State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, China.
Opt Lett. 2013 Jul 15;38(14):2394-6. doi: 10.1364/OL.38.002394.
One economical method for extracting the light loss from both the waveguide mode and substrate is demonstrated. Pillar arrays with different scales are created on the two sides of a silica substrate by inductively coupled plasma etching following a colloidal masking. The quasi-periodic Bragg scattering structure on a silica/ITO interface led to a two-fold current efficiency without introducing a spectral shift or directionality. Meanwhile, the subwavelength-scaled antireflection structure on a silica/air interface produced further increases in efficiency by 40%. The organic light-emitting device directly fabricated on the double-sided nanotextured silica substrate reached an overall enhancement factor of ~2.8 with the current efficiency.
本文展示了一种经济高效的方法，用于提取波导模式和衬底的光损耗。通过感应耦合等离子体刻蚀在二氧化硅衬底的两侧形成胶体掩模后，制作出不同尺度的柱列阵列。在二氧化硅/ITO 界面上的准周期布拉格散射结构导致电流效率提高了一倍，而没有引入光谱位移或方向性。同时，在二氧化硅/空气界面上的亚波长抗反射结构进一步将效率提高了 40%。直接在双面纳米结构化二氧化硅衬底上制造的有机发光器件的电流效率达到了约 2.8 的整体增强因子。
