Department of Materials, University of Oxford, Parks Road, Oxford OX1 3PH, UK.
Microsc Microanal. 2013 Dec;19(6):1709-17. doi: 10.1017/S1431927613013299. Epub 2013 Aug 28.
Atom probe is a nanoscale technique for creating three-dimensional spatially and chemically resolved point datasets, primarily of metallic or semiconductor materials. While atom probe can achieve local high-level resolution, the spatial coherence of the technique is highly dependent upon the evaporative physics in the material and can often result in large geometric distortions in experimental results. The distortions originate from uncertainties in the projection function between the field evaporating specimen and the ion detector. Here we explore the possibility of continuum numerical approximations to the evaporative behavior during an atom probe experiment, and the subsequent propagation of ions to the detector, with particular emphasis placed on the solution of axisymmetric systems, such as isolated particles and multilayer systems. Ultimately, this method may prove critical in rapid modeling of tip shape evolution in atom probe tomography, which itself is a key factor in the rapid generation of spatially accurate reconstructions in atom probe datasets.
原子探针是一种用于创建三维空间和化学分辨率点数据集的纳米技术，主要用于金属或半导体材料。虽然原子探针可以实现局部的高分辨率，但该技术的空间相干性高度依赖于材料中的蒸发物理，并且经常导致实验结果中的大几何变形。这些变形源于场蒸发样品和离子探测器之间投影函数的不确定性。在这里，我们探索了在原子探针实验过程中对蒸发行为进行连续数值逼近的可能性，以及随后离子传播到探测器的情况，特别强调了轴对称系统的解决方案，例如孤立粒子和多层系统。最终，这种方法可能在原子探针断层扫描中快速模拟尖端形状演化方面至关重要，而这本身又是在原子探针数据集中快速生成空间准确重建的关键因素。
