IEEE Trans Ultrason Ferroelectr Freq Control. 2013 Oct;60(10):2039-43. doi: 10.1109/TUFFC.2013.2794.
This work presents for the first time a flexible over-moded resonator (OMR) based on P(VDF-TrFE) thin films. The devices were manufactured on commercially available elastic substrate with inkjet-printed electrodes. The sensing copolymer films used in the devices were polarized by the corona method after electrode deposition. The main performance parameters of the component were then determined. The manufactured OMRs on P(VDF-TrFE) exhibited a linear variation of frequency versus temperature and a very large value of temperature coefficient of frequency (TCF ≫ 1600 ppm/°C). These properties suggest a great potential for using such components as low-cost and high-precision temperature sensors. The electromechanical coupling coefficient and the quality factor of the resonator were also characterized versus temperature.
本文首次提出了一种基于聚偏二氟乙烯-三氟乙烯（P(VDF-TrFE)）薄膜的柔性过模谐振器（OMR）。该器件是在市售的弹性衬底上通过喷墨打印电极制造的。在沉积电极后，采用电晕法对器件中的传感共聚薄膜进行极化。然后确定了组件的主要性能参数。在 P(VDF-TrFE) 上制造的 OMR 表现出频率随温度的线性变化和非常大的频率温度系数（TCF ≫ 1600 ppm/°C）。这些特性表明，此类组件在低成本和高精度温度传感器方面具有巨大的应用潜力。还针对温度对谐振器的机电耦合系数和品质因数进行了表征。
