Rhee Hyug-Gyo, Ghim Young-Sik, Lee Joohyung, Yang Ho-Soon, Lee Yun-Woo
Opt Express. 2013 Oct 21;21(21):24799-808. doi: 10.1364/OE.21.024799.
A lateral shearing interferometer has an advantage over previous wavefront measuring interferometers since it requires no reference. Therefore the lateral shearing interferometer can be a powerful solution to measure a freeform surface. It, however, has some issues to be resolved before it can be implemented. One of them is the orthogonality problem between two shearing directions in LSI. Previous wavefront reconstruction algorithms assume that the shearing directions are perfectly orthogonal to each other and lateral shear is obtained simultaneously in the sagittal and tangential directions. For practical LSI, however, there is no way to guarantee perfect orthogonality between two shearing directions. Motivated by this, we propose a new algorithm that is able to compensate the rotational inaccuracy. The mathematical model is derived in this paper. Computer simulations and experiments are also displayed to verify our algorithm.
横向剪切干涉仪相对于以前的波前测量干涉仪具有优势,因为它不需要参考光。因此,横向剪切干涉仪可以成为测量自由曲面的有力解决方案。然而,在其能够得到应用之前,还存在一些问题需要解决。其中之一是横向剪切干涉仪(LSI)中两个剪切方向之间的正交性问题。以前的波前重建算法假定剪切方向彼此完全正交,并且在矢状面和切向方向上同时获得横向剪切。然而,对于实际的横向剪切干涉仪而言,无法保证两个剪切方向之间的完全正交性。受此启发,我们提出了一种能够补偿旋转误差的新算法。本文推导了该数学模型。还展示了计算机模拟和实验以验证我们的算法。