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基于横向多剪切干涉图的二维波前重建

Two-dimensional wavefront reconstruction from lateral multi-shear interferograms.

作者信息

Guo Yun-feng, Chen Hao, Xu Ji, Ding Jianping

机构信息

Nanjing National Laboratory of Microstructures and School of Physics, Nanjing University, Nanjing 210093, China.

出版信息

Opt Express. 2012 Jul 2;20(14):15723-33. doi: 10.1364/OE.20.015723.

DOI:10.1364/OE.20.015723
PMID:22772264
Abstract

We propose and demonstrate multiple shearing interferometry for measuring two-dimensional phase object. Multi-shear interference can effectively eliminate the problem of spectral leakage that results from the single-shear interference. The Fourier coefficients of a two-dimensional wavefront are computed from phase differences obtained from multiple shearing interferograms, which are acquired by a shearing interferometer, and the desired phase is then reconstructed. Numerical and optical tests have confirmed that the multiple shearing interferometry has a higher recovery accuracy than single-shear interferometry and the reconstruction precision increases as the number of shear steps increases.

摘要

我们提出并演示了用于测量二维相位物体的多重剪切干涉测量法。多重剪切干涉可有效消除单剪切干涉导致的频谱泄漏问题。二维波前的傅里叶系数由通过剪切干涉仪获取的多重剪切干涉图得到的相位差计算得出,然后重建所需相位。数值和光学测试已证实,多重剪切干涉测量法比单剪切干涉测量法具有更高的恢复精度,并且重建精度随着剪切步数的增加而提高。

相似文献

1
Two-dimensional wavefront reconstruction from lateral multi-shear interferograms.基于横向多剪切干涉图的二维波前重建
Opt Express. 2012 Jul 2;20(14):15723-33. doi: 10.1364/OE.20.015723.
2
Recovery of wavefront from multi-shear interferograms with different tilts.从具有不同倾斜度的多剪切干涉图中恢复波前。
Opt Express. 2014 May 19;22(10):11407-16. doi: 10.1364/OE.22.011407.
3
Lateral shearing interferometry method based on double-checkerboard grating by suppressing aliasing effect.基于双棋盘格光栅抑制混叠效应的横向剪切干涉测量方法。
Opt Express. 2024 Apr 8;32(8):13672-13687. doi: 10.1364/OE.519711.
4
Use of numerical orthogonal transformation for the Zernike analysis of lateral shearing interferograms.数值正交变换在横向剪切干涉图泽尼克分析中的应用。
Opt Express. 2012 Jan 16;20(2):1530-44. doi: 10.1364/OE.20.001530.
5
Two-dimensional wave-front reconstruction from lateral shearing interferograms.基于横向剪切干涉图的二维波前重建
Opt Express. 2006 Jan 23;14(2):625-34. doi: 10.1364/opex.14.000625.
6
Correction of rotational inaccuracy in lateral shearing interferometry for freeform measurement.用于自由曲面测量的横向剪切干涉测量中旋转误差的校正。
Opt Express. 2013 Oct 21;21(21):24799-808. doi: 10.1364/OE.21.024799.
7
Analysis of lateral shearing interferometry without self-imaging limitations.无自成像限制的横向剪切干涉测量分析。
Appl Opt. 2015 Sep 20;54(27):8070-9. doi: 10.1364/AO.54.008070.
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Wavefront restoration from lateral shearing data using spectral interpolation.利用频谱插值从横向剪切数据中恢复波前。
Appl Opt. 2023 Oct 10;62(29):7549-7559. doi: 10.1364/AO.500453.
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Method for evaluating lateral shearing interferograms.横向剪切干涉图的评估方法。
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Measurement of thermo-elastic deformation of an optic using a polarization-based shearing interferometer.使用基于偏振的剪切干涉仪测量光学元件的热弹性变形。
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引用本文的文献

1
Optimization of wavefront reconstruction accuracy for conjugate shift differential absolute testing.共轭偏移差动绝对测试中波前重构精度的优化。
Sci Rep. 2022 Dec 16;12(1):21751. doi: 10.1038/s41598-022-26380-y.
2
Quadriwave lateral shearing interferometric microscopy with wideband sensitivity enhancement for quantitative phase imaging in real time.四波横向剪切干涉显微镜具有宽带灵敏度增强功能,可实时进行定量相位成像。
Sci Rep. 2017 Jan 31;7(1):9. doi: 10.1038/s41598-017-00053-7.