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聚焦离子束整体材料的连续切片和成像,用于 3D 重建和形态参数评估。

Focussed ion beam serial sectioning and imaging of monolithic materials for 3D reconstruction and morphological parameter evaluation.

机构信息

Irish Separation Science Cluster, National Centre for Sensor Research, Dublin City University, Glasnevin, Dublin 9, Ireland.

出版信息

Analyst. 2014 Jan 7;139(1):99-104. doi: 10.1039/c3an01827j. Epub 2013 Oct 25.

Abstract

A new characterisation method, based on the utilisation of focussed ion beam-scanning electron microscopy (FIB-SEM), has been employed for the evaluation of morphological parameters in porous monolithic materials. Sample FIB serial sectioning, SEM imaging and image processing techniques were used to extract the pore boundaries and reconstruct the 3D porous structure of carbon and silica-based monoliths. Since silica is a non-conducting material, a commercial silica monolith modified with activated carbon was employed instead to minimise the charge build-up during FIB sectioning. This work therefore presents a novel methodology that can be successfully employed for 3D reconstruction of porous monolithic materials which are or can be made conductive through surface or bulk modification. Furthermore, the 3D reconstructions were used for calculation of the monolith macroporosity, which was in good agreement with the porosity values obtained by mercury intrusion porosimetry (MIP).

摘要

一种新的基于聚焦离子束-扫描电子显微镜(FIB-SEM)的特征化方法已被用于多孔整体材料的形态参数评估。采用样品 FIB 连续切片、SEM 成像和图像处理技术提取孔边界并重建碳基和硅基整体的 3D 多孔结构。由于二氧化硅是非导电材料,因此使用经过活性炭改性的商业二氧化硅整体来最小化 FIB 切片过程中的电荷积累。因此,本工作提出了一种新颖的方法,可成功用于通过表面或体相改性而具有导电性或可具有导电性的多孔整体材料的 3D 重建。此外,3D 重建用于计算整体的大孔率,其与汞侵入孔隙率(MIP)得到的孔隙率值吻合良好。

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