Dong Li-Na, Wang Yu-Xin, Sun Jing-Chang, Zheng Ya-Ru, Zhang Huan, Liang Ming, Lin Mao-Kui, Cui Shuo
School of Physics and Electronic Technology, Liaoning Normal University, Dalian 116029, China.
Guang Pu Xue Yu Guang Pu Fen Xi. 2013 Aug;33(8):2051-4.
ZnMgO films were deposited on quartz glass substrates by the ultrasonic spray pyrolysis at different substrate temperatures (450-550 degrees C). The structural, surface morphological and optical properties of the samples were investigated by X-ray diffraction (XRD), scanning electron microscope (SEM) and photoluminescence (PL) spectroscopy. The results demonstrate that the substrate temperature has important effect on structural and optical characteristics. All the films have hexagonal wurtzite polycrystalline structures and the c-axis preferential orientation has an optimum temperature of 530 degrees C. The sample prepared at this temperature owns uniform grain size, smooth surface morphology and better crystalline quality. The width of deep-level emission decreases and the near band edge (NBE) ultraviolet emission peak appears with the increase in temperature by the PL spectrum. When the temperature arrives to 530 degrees C, a distinct NBE emission peak can be observed at 374. 5 nm, while the deep level emission is almost undetectable.
通过超声喷雾热解法在不同衬底温度（450 - 550摄氏度）下将ZnMgO薄膜沉积在石英玻璃衬底上。通过X射线衍射（XRD）、扫描电子显微镜（SEM）和光致发光（PL）光谱对样品的结构、表面形态和光学性质进行了研究。结果表明，衬底温度对结构和光学特性有重要影响。所有薄膜均具有六方纤锌矿多晶结构，c轴择优取向在530摄氏度时有最佳温度。在此温度下制备的样品具有均匀的晶粒尺寸、光滑的表面形态和更好的晶体质量。通过PL光谱，随着温度升高，深能级发射宽度减小，近带边（NBE）紫外发射峰出现。当温度达到530摄氏度时，在374.5 nm处可观察到明显的NBE发射峰，而深能级发射几乎不可检测。
