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印刷铟锡氧化物薄膜的可靠性表征

Characterization of reliability of printed indium tin oxide thin films.

作者信息

Hong Sung-Jei, Kim Jong-Woong, Jung Seung-Boo

机构信息

Display Components and Materials Research Center Korea Electronics Technology Institute, Seongnam 463-816, Korea.

出版信息

J Nanosci Nanotechnol. 2013 Nov;13(11):7770-3. doi: 10.1166/jnn.2013.7813.

DOI:10.1166/jnn.2013.7813
PMID:24245331
Abstract

Recently, decreasing the amount of indium (In) element in the indium tin oxide (ITO) used for transparent conductive oxide (TCO) thin film has become necessary for cost reduction. One possible approach to this problem is using printed ITO thin film instead of sputtered. Previous studies showed potential for printed ITO thin films as the TCO layer. However, nothing has been reported on the reliability of printed ITO thin films. Therefore, in this study, the reliability of printed ITO thin films was characterized. ITO nanoparticle ink was fabricated and printed onto a glass substrate followed by heating at 400 degrees C. After measurement of the initial values of sheet resistance and optical transmittance of the printed ITO thin films, their reliabilities were characterized with an isothermal-isohumidity test for 500 hours at 85 degrees C and 85% RH, a thermal shock test for 1,000 cycles between 125 degrees C and -40 degrees C, and a high temperature storage test for 500 hours at 125 degrees C. The same properties were investigated after the tests. Printed ITO thin films showed stable properties despite extremely thermal and humid conditions. Sheet resistances of the printed ITO thin films changed slightly from 435 omega/square to 735 omega/square 507 omega/square and 442 omega/square after the tests, respectively. Optical transmittances of the printed ITO thin films were slightly changed from 84.74% to 81.86%, 88.03% and 88.26% after the tests, respectively. These test results suggest the stability of printed ITO thin film despite extreme environments.

摘要

最近,为了降低成本,减少用于透明导电氧化物(TCO)薄膜的氧化铟锡(ITO)中的铟(In)元素含量变得很有必要。解决这个问题的一种可能方法是使用印刷ITO薄膜而不是溅射法制备的薄膜。先前的研究表明印刷ITO薄膜作为TCO层具有潜力。然而,关于印刷ITO薄膜的可靠性尚未有报道。因此,在本研究中,对印刷ITO薄膜的可靠性进行了表征。制备了ITO纳米颗粒墨水并将其印刷在玻璃基板上,然后在400℃下加热。在测量印刷ITO薄膜的初始表面电阻和光学透过率值之后,通过在85℃和85%相对湿度下进行500小时的等温 - 等湿测试、在125℃和 - 40℃之间进行1000次循环的热冲击测试以及在125℃下进行500小时的高温存储测试来表征其可靠性。测试后对相同的性能进行了研究。尽管处于极端的热和湿条件下,印刷ITO薄膜仍表现出稳定的性能。测试后,印刷ITO薄膜的表面电阻分别从435Ω/□略微变化到735Ω/□、507Ω/□和442Ω/□。测试后,印刷ITO薄膜的光学透过率分别从84.74%略微变化到81.86%、88.03%和88.26%。这些测试结果表明印刷ITO薄膜在极端环境下具有稳定性。

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