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采用双激光光学干涉测量法进行绝对距离传感。

Absolute distance sensing by two laser optical interferometry.

作者信息

Thurner Klaus, Braun Pierre-François, Karrai Khaled

机构信息

attocube systems AG, Königinstraße 11a RGB, 80539 München, Germany.

出版信息

Rev Sci Instrum. 2013 Nov;84(11):115002. doi: 10.1063/1.4831800.

Abstract

We have developed a method for absolute distance sensing by two laser optical interferometry. A particularity of this technique is that a target distance is determined in absolute and is no longer limited to within an ambiguity range affecting usually multiple wavelength interferometers. We implemented the technique in a low-finesse Fabry-Pérot miniature fiber based interferometer. We used two diode lasers, both operating in the 1550 nm wavelength range. The wavelength difference is chosen to create a 25 μm long periodic beating interferometric pattern allowing a nanometer precise position measurement but limited to within an ambiguity range of 25 μm. The ambiguity is then eliminated by scanning one of the wavelengths over a small range (3.4 nm). We measured absolute distances in the sub-meter range and this with just few nanometer repeatability.

摘要

我们开发了一种通过双激光光学干涉测量法进行绝对距离传感的方法。该技术的一个特点是目标距离是绝对确定的,不再局限于通常影响多波长干涉仪的模糊范围内。我们在基于低精细度法布里 - 珀罗微型光纤的干涉仪中实现了该技术。我们使用了两个二极管激光器,均工作在1550nm波长范围内。选择波长差以创建一个25μm长的周期性拍频干涉图样,从而实现纳米级精确位置测量,但限于25μm的模糊范围内。然后通过在小范围(3.4nm)内扫描其中一个波长来消除模糊性。我们测量了亚米范围内的绝对距离,并且具有仅几纳米的重复性。

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