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基于频率梳参考的多波长干涉测量法实现实时米级绝对距离测量

Real-Time and Meter-Scale Absolute Distance Measurement by Frequency-Comb-Referenced Multi-Wavelength Interferometry.

作者信息

Wang Guochao, Tan Lilong, Yan Shuhua

机构信息

High-tech Institution of Xi'an, Xi'an 710025, China.

College of Mechatronic Engineering and Automation, National University of Defense Technology, Changsha 410073, China.

出版信息

Sensors (Basel). 2018 Feb 7;18(2):500. doi: 10.3390/s18020500.

Abstract

We report on a frequency-comb-referenced absolute interferometer which instantly measures long distance by integrating multi-wavelength interferometry with direct synthetic wavelength interferometry. The reported interferometer utilizes four different wavelengths, simultaneously calibrated to the frequency comb of a femtosecond laser, to implement subwavelength distance measurement, while direct synthetic wavelength interferometry is elaborately introduced by launching a fifth wavelength to extend a non-ambiguous range for meter-scale measurement. A linearity test performed comparatively with a He-Ne laser interferometer shows a residual error of less than 70.8 nm in peak-to-valley over a 3 m distance, and a 10 h distance comparison is demonstrated to gain fractional deviations of ~3 × 10 versus 3 m distance. Test results reveal that the presented absolute interferometer enables precise, stable, and long-term distance measurements and facilitates absolute positioning applications such as large-scale manufacturing and space missions.

摘要

我们报道了一种频率梳参考绝对干涉仪,它通过将多波长干涉测量与直接合成波长干涉测量相结合,能够即时测量长距离。所报道的干涉仪利用四个不同波长,同时校准到飞秒激光的频率梳,以实现亚波长距离测量,同时通过引入第五个波长精心引入直接合成波长干涉测量,以扩展用于米级测量的无模糊范围。与氦氖激光干涉仪进行比较的线性测试表明,在3米距离上峰谷残余误差小于70.8纳米,并且在3米距离上进行10小时的距离比较,偏差分数约为3×10⁻⁶。测试结果表明,所提出的绝对干涉仪能够进行精确、稳定和长期的距离测量,并有助于诸如大规模制造和太空任务等绝对定位应用。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/697c/5855924/03678508b50f/sensors-18-00500-g002.jpg

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