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新型锆β-酮亚胺配合物的合成、表征及其在 ZrO2 薄膜溶液法加工中的应用评估。

Novel β-ketoiminato complexes of zirconium: synthesis, characterization and evaluation for solution based processing of ZrO2 thin films.

机构信息

Inorganic Materials Chemistry, Faculty of Chemistry and Biochemistry, Ruhr-University Bochum, 44801 Bochum, Germany.

出版信息

Dalton Trans. 2014 Feb 14;43(6):2384-96. doi: 10.1039/c3dt52335g. Epub 2013 Dec 3.

Abstract

Treatment of tetrakis(diethylamido)zirconium(IV); [Zr(NEt2)4] with a series of β-ketoimines ({[RHN]C(CH3)=C(H)C(CH3)=O} where R is a functionalized side-chain; 4-(2-methoxyethylamino)pent-3-en-2-one, Hmeap; 4-(3-methoxypropylamino)pent-3-en-2-one, Hmpap; 4-(2-(dimethylamino)ethylamino)pent-3-en-2-one, Hdeap; 4-(3-(dimethylamino)propylamino)pent-3-en-2-one, Hdpap) leads to an amine substitution reaction that yielded novel monomeric heteroleptic mixed amido-ketoiminato complexes of the type bis(4-(2-methoxyethylamino)pent-3-en-2-onato)bis(diethylamido)zirconium(IV) (1), bis(4-(3-methoxypropylamino)pent-3-en-2-onato)bis(diethylamido)zirconium(IV) (2), and bis(4-(3-(dimethylamino)propylamino)pent-3-en-2-onato)bis(diethylamido)zirconium(IV) (3), and eight-coordinated homoleptic complexes tetrakis(4-(2-methoxyethylamino)pent-3-en-2-onato)zirconium(IV) (4) and tetrakis(4-(2-(dimethylamino)ethylamino)pent-3-en-2-onato)zirconium(IV) (5), depending on the ratio of the ligand to zirconium. Adopting a similar strategy with zirconium alkoxide, namely [Zr(O(i)Pr)4·(i)PrOH], with β-ketoimine Hmeap, leads to the formation of a dimer, bis(μ2-isopropoxo)bis(4-(2-methoxyethylamino)pent-3-en-2-onato)tetrakis(isopropoxo)dizirconium(IV) (6). The newly synthesised complexes were characterized by NMR spectroscopy, mass spectrometry, single crystal X-ray diffraction, elemental analysis and thermal analysis. The low decomposition temperature facilitated by the stepwise elimination of the ketominate ligand from the complex and the stability of the complexes obtained in air as well as in solution makes them highly suitable for solution based processing of ZrO2 thin films, which is demonstrated using compound 5 on Si(100) substrates. High quality ZrO2 films were obtained and were investigated for their structure, morphology, composition and optical properties. Low temperature crystallisation of ZrO2 is achieved by a simple chemical deposition process using the new class of Zr precursors and the films exhibit an optical transmittance above 90%.

摘要

四(二乙氨基)锆(IV)的处理;[Zr(NEt2)4]与一系列β-酮亚胺({[RHN]C(CH3)=C(H)C(CH3)=O},其中 R 是功能化侧链;4-(2-甲氧基乙基氨基)戊-3-烯-2-酮,Hmeap;4-(3-甲氧基丙基氨基)戊-3-烯-2-酮,Hmpap;4-(2-(二甲基氨基)乙基氨基)戊-3-烯-2-酮,Hdeap;4-(3-(二甲基氨基)丙基氨基)戊-3-烯-2-酮,Hdpap)导致胺取代反应,生成了新型单核异核混合酰胺-酮亚胺配合物,如二(4-(2-甲氧基乙基氨基)戊-3-烯-2-酮)二(二乙氨基)锆(IV)(1)、二(4-(3-甲氧基丙基氨基)戊-3-烯-2-酮)二(二乙氨基)锆(IV)(2)和二(4-(3-(二甲基氨基)丙基氨基)戊-3-烯-2-酮)二(二乙氨基)锆(IV)(3),以及八配位均相配合物四(4-(2-甲氧基乙基氨基)戊-3-烯-2-酮)锆(IV)(4)和四(4-(2-(二甲基氨基)乙基氨基)戊-3-烯-2-酮)锆(IV)(5),这取决于配体与锆的比例。采用类似的策略,即用β-酮亚胺 Hmeap 处理锆醇盐[Zr(O(i)Pr)4·(i)PrOH],得到二聚体二(μ2-异丙氧基)二(4-(2-甲氧基乙基氨基)戊-3-烯-2-酮)四(异丙氧基)二锆(IV)(6)。新合成的配合物通过 NMR 光谱、质谱、单晶 X 射线衍射、元素分析和热分析进行了表征。配合物中酮亚胺配体的逐步消除所导致的低分解温度以及配合物在空气中以及溶液中的稳定性,使得它们非常适合用于 ZrO2 薄膜的溶液处理,这在 Si(100)衬底上用化合物 5 得到了证明。获得了高质量的 ZrO2 薄膜,并对其结构、形态、组成和光学性能进行了研究。通过使用新型锆前体的简单化学沉积工艺实现了 ZrO2 的低温结晶,并且薄膜表现出超过 90%的光透过率。

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