FOM-Institute, Dutch Institute for Fundamental Energy Research , Edisonbaan 14, 3439MN Nieuwegein, The Netherlands.
ACS Appl Mater Interfaces. 2014 Mar 12;6(5):3462-8. doi: 10.1021/am405624v. Epub 2014 Feb 11.
The behavior of iron surfaces under helium plasma exposure is investigated as a function of surface temperature, plasma exposure time, and He ion flux. Different surface morphologies are observed for a large process parameter range and discussed in terms of temperature-related surface mechanisms. Surface modification is observed under low-He ion flux (in the range of 10(20) m(-2) s(-1)) irradiation, whereas fiberlike iron nanostructures are formed by exposing the surface to a high flux (in the range of 10(23) m(-2) s(-1)) of low-energy He ions at surface temperatures of 450-700 °C. The effects of surface temperature and plasma exposure time on nanostructures are studied. The results show that surface processing by high-flux low-energy He ion bombardment provides a size-controlled nanostructuring on iron surfaces.
研究了氦等离子体暴露下铁表面的行为,作为表面温度、等离子体暴露时间和氦离子通量的函数。在很大的工艺参数范围内观察到不同的表面形貌,并根据与温度相关的表面机制进行了讨论。在低氦离子通量(范围为 10(20) m(-2) s(-1))辐照下观察到表面改性,而在表面温度为 450-700°C 时,通过用高通量(范围为 10(23) m(-2) s(-1))低能氦离子暴露表面,形成纤维状铁纳米结构。研究了表面温度和等离子体暴露时间对纳米结构的影响。结果表明,通过高通量低能氦离子轰击进行表面处理可在铁表面进行尺寸可控的纳米结构化处理。