低能氦离子高通量诱导的表面改性

Surface modifications induced by high fluxes of low energy helium ions.

作者信息

Tanyeli İrem, Marot Laurent, Mathys Daniel, van de Sanden Mauritius C M, De Temmerman Gregory

机构信息

FOM-Institute DIFFER, Dutch Institute For Fundamental Energy Research, Edisonbaan 14, 3439MN, Nieuwegein, The Netherlands.

Department of Physics, University of Basel, Klingelbergstrasse 82, CH-4056 Basel, Switzerland.

出版信息

Sci Rep. 2015 Apr 28;5:9779. doi: 10.1038/srep09779.

DOI:10.1038/srep09779

PMID:25919912

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC4412079/

Abstract

Several metal surfaces, such as titanium, aluminum and copper, were exposed to high fluxes (in the range of 10(23) m(-2) s(-1)) of low energy (<100 eV) Helium (He) ions. The surfaces were analyzed by scanning electron microscopy and to get a better understanding on morphology changes both top view and cross sectional images were taken. Different surface modifications, such as voids and nano pillars, are observed on these metals. The differences and similarities in the development of surface morphologies are discussed in terms of the material properties and compared with the results of similar experimental studies. The results show that He ions induced void growth and physical sputtering play a significant role in surface modification using high fluxes of low energy He ions.

摘要

几种金属表面，如钛、铝和铜，暴露于高通量（范围为10(23) m(-2) s(-1)）的低能（<100 eV）氦（He）离子中。通过扫描电子显微镜对这些表面进行分析，为了更好地理解形态变化，拍摄了顶视图和横截面图像。在这些金属上观察到了不同的表面改性，如空洞和纳米柱。根据材料特性讨论了表面形态发展的差异和相似性，并与类似实验研究的结果进行了比较。结果表明，氦离子诱导的空洞生长和物理溅射在使用高通量低能氦离子进行表面改性中起着重要作用。