Development of a novel radio-frequency negative hydrogen ion source in conically converging configuration.

Volume-produced negative ion source still requires enhancement of current density with lower input RF (radio-frequency) power in lower operating pressure for various applications. To confirm recent observation of efficient negative ion production with a short cylindrical chamber with smaller effective plasma size, the RF-driven transformer-coupled plasma H(-) ion source at Seoul National University is modified by adopting a newly designed quartz RF window to reduce the chamber length. Experiments with the reduced chamber length show a few times enhancement of H(-) ion beam current compared to that extracted from the previous chamber design, which is consistent with the measured H(-) ion population. Nevertheless, decrease in H(-) ion beam current observed in low pressure regime below ∼5 mTorr owing to insufficient filtering of high energy electrons in the extraction region needs to be resolved to address the usefulness of electron temperature control by the change of geometrical configuration of the discharge chamber. A new discharge chamber with conically converging configuration has been developed, in which the chamber diameter decreases as approaching to the extraction region away from the planar RF antenna such that stronger filter magnetic field can be utilized to prohibit high energy electrons from transporting to the extraction region. First experimental results for the H(-) ion beam extraction with this configuration show that higher magnetic filter field makes peak negative beam currents happen in lower operating pressure. However, overall decrease in H(-) ion beam current due to the change of chamber geometry still requires further study of geometrical effect on particle transport and optimization of magnetic field in this novel configuration.