使用存储物质技术降低二次离子质谱（SIMS）基体效应：不同基体中钛的案例研究

Reduction of the SIMS matrix effect using the storing matter technique: a case study on Ti in different matrices.

作者信息

Kasel B, Wirtz T

机构信息

Centre de Recherche Public - Gabriel Lipppmann, 41, rue du Brill, L-4422 Belvaux, Luxembourg.

出版信息

Anal Chem. 2014 Apr 15;86(8):3750-5. doi: 10.1021/ac4030472. Epub 2014 Mar 24.

DOI:10.1021/ac4030472

PMID:24621151

Abstract

Matrix effects in secondary ion mass spectrometry render quantitative analysis difficult. In this paper, we report on the quantitative potential of the so-called storing matter technique. On the basis of a case study focusing on Ti sputtered from five different chemical environments (Ti, TiB2,TiC, TiN and TiO2), we demonstrate for the first time that the SIMS matrix effect can be avoided in a multitude of matrices by this novel approach. The effect of the collector material (Au, Ag, Cu, and Ta) on the overall efficiency of the storing matter process is investigated. In addition, the influence of oxygen on the obtained useful yields is exposed. Finally, the performance of the storing matter technique is compared to standard SIMS analysis.

摘要

二次离子质谱中的基体效应使得定量分析变得困难。在本文中，我们报道了所谓存储物质技术的定量潜力。基于一个以从五种不同化学环境（Ti、TiB₂、TiC、TiN和TiO₂）溅射的Ti为重点的案例研究，我们首次证明通过这种新方法可以在多种基体中避免二次离子质谱的基体效应。研究了收集器材料（Au、Ag、Cu和Ta）对存储物质过程整体效率的影响。此外，还揭示了氧对所获得的有用产率的影响。最后，将存储物质技术的性能与标准二次离子质谱分析进行了比较。