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用于微机电系统(MEMS)应用的基于新型压电效应和表面等离子体共振的元件。

Novel piezoelectric effect and surface plasmon resonance-based elements for MEMS applications.

作者信息

Ponelyte Sigita, Palevicius Arvydas

机构信息

Kaunas University of Technology, International Studies Centre, A. Mickeviciaus g. 37, Kaunas LT-44244, Lithuania.

出版信息

Sensors (Basel). 2014 Apr 17;14(4):6910-21. doi: 10.3390/s140406910.

DOI:10.3390/s140406910
PMID:24747733
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC4029663/
Abstract

This paper covers research on novel thin films with periodical microstructure--optical elements, exhibiting a combination of piezoelectric and surface plasmon resonance effects. The research results showed that incorporation of Ag nanoparticles in novel piezoelectric--plasmonic elements shift a dominating peak in the visible light spectrum. This optical window is essential in the design of optical elements for sensing systems. Novel optical elements can be tunable under defined bias and change its main grating parameters (depth and width) influencing the response of diffraction efficiencies. These elements allow opening new avenues in the design of more sensitive and multifunctional microdevices.

摘要

本文涵盖了对具有周期性微观结构的新型薄膜——光学元件的研究,这些元件展现出压电和表面等离子体共振效应的结合。研究结果表明,在新型压电 - 等离子体元件中掺入银纳米颗粒会使可见光谱中的主峰发生偏移。这个光学窗口对于传感系统光学元件的设计至关重要。新型光学元件在特定偏压下可调节,并改变其主要光栅参数(深度和宽度),从而影响衍射效率的响应。这些元件为设计更灵敏和多功能的微器件开辟了新途径。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f8f1/4029663/9a050f4502dc/sensors-14-06910f6.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f8f1/4029663/4f6aabf27435/sensors-14-06910f1.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f8f1/4029663/31c825a7182a/sensors-14-06910f2.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f8f1/4029663/dccee36b6093/sensors-14-06910f3.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f8f1/4029663/2cdcda104ddd/sensors-14-06910f4.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f8f1/4029663/398e84b55bbb/sensors-14-06910f5.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f8f1/4029663/9a050f4502dc/sensors-14-06910f6.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f8f1/4029663/4f6aabf27435/sensors-14-06910f1.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f8f1/4029663/31c825a7182a/sensors-14-06910f2.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f8f1/4029663/dccee36b6093/sensors-14-06910f3.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f8f1/4029663/2cdcda104ddd/sensors-14-06910f4.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f8f1/4029663/398e84b55bbb/sensors-14-06910f5.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f8f1/4029663/9a050f4502dc/sensors-14-06910f6.jpg

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本文引用的文献

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Biosens Bioelectron. 2012 Jun-Jul;36(1):48-55. doi: 10.1016/j.bios.2012.03.036. Epub 2012 Apr 7.
2
Rapid detection of S-adenosyl homocysteine using self-assembled optical diffraction gratings.
Angew Chem Int Ed Engl. 2008;47(6):1051-3. doi: 10.1002/anie.200703222.
3
Plasmon light scattering in biology and medicine: new sensing approaches, visions and perspectives.生物学与医学中的表面等离子体光散射:新的传感方法、愿景与展望
Curr Opin Chem Biol. 2005 Oct;9(5):538-44. doi: 10.1016/j.cbpa.2005.08.021.