基于 SOI 的阵列波导光栅解调集成微系统的初步研究。

Preliminary investigation of an SOI-based arrayed waveguide grating demodulation integration microsystem.

机构信息

School of Electronics and Information Engineering, Tianjin Polytechnic University, Tianjin 300387, China.

1] School of Electronics and Information Engineering, Tianjin Polytechnic University, Tianjin 300387, China [2] School of Physics, Faculty of Engineering and Information Sciences, University of Wollongong, Wollongong, NSW 2522, Australia.

出版信息

Sci Rep. 2014 May 6;4:4848. doi: 10.1038/srep04848.

DOI:10.1038/srep04848

PMID:24797561

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC4010923/

Abstract

An arrayed waveguide grating (AWG) demodulation integration microsystem is investigated in this study. The system consists of a C-band on-chip LED, a 2 × 2 silicon nanowire-based coupler, a fiber Bragg grating (FBG) array, a 1 × 8 AWG, and a photoelectric detector array. The coupler and AWG are made from silicon-on-insulator wafers using electron beam exposure and response-coupled plasma technology. Experimental results show that the excess loss in the MMI coupler with a footprint of 6 × 100 μm(2) is 0.5423 dB. The 1 × 8 AWG with a footprint of 267 × 381 μm(2) and a waveguide width of 0.4 μm exhibits a central channel loss of -3.18 dB, insertion loss non-uniformity of -1.34 dB, and crosstalk level of -23.1 dB. The entire system is preliminarily tested. Wavelength measurement precision is observed to reach 0.001 nm. The wavelength sensitivity of each FBG is between 0.04 and 0.06 nm/dB.

摘要

本研究探讨了一种阵列波导光栅（AWG）解调集成微系统。该系统由一个 C 波段片上 LED、一个 2×2 硅纳米线基耦合器、一个光纤布拉格光栅（FBG）阵列、一个 1×8 AWG 和一个光电探测器阵列组成。耦合器和 AWG 是使用电子束曝光和反应耦合等离子体技术在绝缘体上硅晶圆上制作的。实验结果表明， footprint 为 6×100μm(2)的 MMI 耦合器的过剩损耗为 0.5423dB。footprint 为 267×381μm(2)、波导宽度为 0.4μm 的 1×8 AWG 的中心通道损耗为-3.18dB，插入损耗不均匀性为-1.34dB，串扰电平为-23.1dB。整个系统进行了初步测试。观察到波长测量精度达到 0.001nm。每个 FBG 的波长灵敏度在 0.04nm/dB 到 0.06nm/dB 之间。