基于介质多层膜的光纤传感器可同时测量湿度和温度。

Dielectric multilayer-based fiber optic sensor enabling simultaneous measurement of humidity and temperature.

作者信息

Yang Minghong, Xie Weijing, Dai Yutang, Lee Dongwen, Dai Jixiang, Zhang Yi, Zhuang Zhi

出版信息

Opt Express. 2014 May 19;22(10):11892-9. doi: 10.1364/OE.22.011892.

DOI:10.1364/OE.22.011892

Abstract

A multilayer-based fiber optic sensor enabling simultaneous measurement of humidity and temperature is proposed and demonstrated. The sensitive elements were multilayer coatings consisting of nano-porous TiO(2) and SiO(2) films, which were deposited on fiber end-face to form a Fabry-Perot (F-P) filter structure. Relative-humidity (RH) sensing is correlated with the shift of interference fringe due to the change of effective refractive index of porous coatings when exposed to different RH environments. The sensor is sealed in a glass tube in case of temperature measurement. Experimental results show that the average sensitivity are 0.43nm/%RH and 0.63nm/°C respectively when environmental RH changes from 1.8%RH to 74.7%RH and temperature changes from 21.4°C to 38.8°C. The proposed sensors present high repeatability, and especially highly sensitive to lower moisture measure.

摘要

提出并演示了一种基于多层结构的光纤传感器，可同时测量湿度和温度。敏感元件是由纳米多孔TiO(2)和SiO(2)薄膜组成的多层涂层，这些涂层沉积在光纤端面上，形成法布里-珀罗（F-P）滤波器结构。相对湿度（RH）传感与干涉条纹的移动相关，这是由于多孔涂层在不同RH环境下有效折射率的变化所致。为了进行温度测量，该传感器密封在玻璃管中。实验结果表明，当环境相对湿度从1.8%RH变化到74.7%RH，温度从21.4°C变化到38.8°C时，平均灵敏度分别为0.43nm/%RH和0.63nm/°C。所提出的传感器具有高重复性，尤其对低湿度测量高度敏感。