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基于游标效应的级联聚合物膜法布里-珀罗传感器用于同时测量相对湿度和温度。

A Fabry-Perot Sensor with Cascaded Polymer Films Based on Vernier Effect for Simultaneous Measurement of Relative Humidity and Temperature.

机构信息

School of Precision Instrument and Opto-Electronics Engineering, Tianjin University, Tianjin 300072, China.

Key Laboratory of Opto-Electronics Information Technology of the Ministry of Education, Tianjin University, Tianjin 300072, China.

出版信息

Sensors (Basel). 2023 Mar 3;23(5):2800. doi: 10.3390/s23052800.

Abstract

In this paper, fiber sensor based on Vernier effect for simultaneous measurement of relative humidity (RH) and temperature is proposed. The sensor is fabricated by coating two kinds of ultraviolet (UV) glue with different refractive indexes (RI) and thicknesses on the end face of a fiber patch cord. The thicknesses of two films are controlled to generate the Vernier effect. The inner film is formed by a cured lower-RI UV glue. The exterior film is formed by a cured higher-RI UV glue, of which thickness is much thinner than the inner film. Through the analysis of the Fast Fourier Transform (FFT) of the reflective spectrum, the Vernier effect is formed by the inner lower-RI polymer cavity and the cavity composed of both polymer films. By calibrating the RH and temperature response of two peaks on the envelope of the reflection spectrum, simultaneous measurements of RH and temperature are realized by solving a set of quadratic equations. Experimental results show that the highest RH and temperature sensitivities of the sensor are 387.3 pm/%RH (in 20%RH to 90%RH) and -533.0 pm/°C (in 15 °C to 40 °C), respectively. The sensor has merits of low cost, simple fabrication, and high sensitivity, which makes it very attractive for applications that need to simultaneously monitor these two parameters.

摘要

本文提出了一种基于 Vernier 效应的光纤传感器,用于同时测量相对湿度 (RH) 和温度。该传感器通过在光纤跳线末端涂覆两种具有不同折射率 (RI) 和厚度的紫外 (UV) 胶来制备。两种薄膜的厚度被控制以产生 Vernier 效应。内层薄膜由较低 RI 的固化 UV 胶形成。外层薄膜由较高 RI 的固化 UV 胶形成,其厚度比内层薄膜薄得多。通过对反射光谱的快速傅里叶变换 (FFT) 分析,Vernier 效应是由内层低 RI 聚合物腔和由两种聚合物膜组成的腔形成的。通过校准反射光谱包络线上两个峰的 RH 和温度响应,通过求解一组二次方程实现 RH 和温度的同时测量。实验结果表明,该传感器的最高 RH 和温度灵敏度分别为 387.3 pm/%RH(在 20%RH 到 90%RH 范围内)和-533.0 pm/°C(在 15°C 到 40°C 范围内)。该传感器具有成本低、制造简单、灵敏度高等优点,非常适合需要同时监测这两个参数的应用。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/eca8/10006980/ad0a1804eb59/sensors-23-02800-g001.jpg

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