Tsao Yao-Chung, Fisker Christian, Pedersen Thomas Garm
Opt Express. 2014 May 5;22 Suppl 3:A651-62. doi: 10.1364/OE.22.00A651.
The development of optimal backside reflectors (BSRs) is crucial for future low cost and high efficiency silicon (Si) thin-film solar cells. In this work, nanostructured polymer substrates with aluminum coatings intended as BSRs were produced by positive and negative nanoimprint lithography (NIL) techniques, and hydrogenated amorphous silicon (a-Si:H) was deposited hereon as absorbing layers. The relationship between optical properties and geometry of front textures was studied by combining experimental reflectance spectra and theoretical simulations. It was found that a significant height variation on front textures plays a critical role for light-trapping enhancement in solar cell applications. As a part of sample preparation, a transfer NIL process was developed to overcome the problem of low heat deflection temperature of polymer substrates during solar cell fabrication.
开发优化的背反射器（BSR）对于未来低成本、高效率的硅（Si）薄膜太阳能电池至关重要。在这项工作中，通过正、负纳米压印光刻（NIL）技术制备了带有铝涂层的纳米结构聚合物基板作为背反射器，并在其上沉积氢化非晶硅（a-Si:H）作为吸收层。通过结合实验反射光谱和理论模拟，研究了正面纹理的光学性质与几何形状之间的关系。结果发现，正面纹理上显著的高度变化对太阳能电池应用中的光捕获增强起着关键作用。作为样品制备的一部分，开发了一种转移NIL工艺，以克服太阳能电池制造过程中聚合物基板热变形温度低的问题。
