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使用爱格探测器的高通量叠层成像:扩展区域的扫描X射线纳米成像

High-throughput ptychography using Eiger: scanning X-ray nano-imaging of extended regions.

作者信息

Guizar-Sicairos Manuel, Johnson Ian, Diaz Ana, Holler Mirko, Karvinen Petri, Stadler Hans-Christian, Dinapoli Roberto, Bunk Oliver, Menzel Andreas

出版信息

Opt Express. 2014 Jun 16;22(12):14859-70. doi: 10.1364/OE.22.014859.

Abstract

The smaller pixel size and high frame rate of next-generation photon counting pixel detectors opens new opportunities for the application of X-ray coherent diffractive imaging (CDI). In this manuscript we demonstrate fast image acquisition for ptychography using an Eiger detector. We achieve above 25,000 resolution elements per second, or an effective dwell time of 40 μs per resolution element, when imaging a 500 μm × 290 μm region of an integrated electronic circuit with 41 nm resolution. We further present the application of a scheme of sharing information between image parts that allows the field of view to exceed the range of the piezoelectric scanning system and requirements on the stability of the illumination to be relaxed.

摘要

下一代光子计数像素探测器更小的像素尺寸和高帧率为X射线相干衍射成像(CDI)的应用带来了新机遇。在本论文中,我们展示了使用Eiger探测器进行快速图像采集的叠层成像技术。当对一个分辨率为41纳米、尺寸为500微米×290微米的集成电路区域进行成像时,我们每秒可获得超过25,000个分辨率单元,即每个分辨率单元的有效驻留时间为40微秒。我们还介绍了一种图像部分之间共享信息的方案的应用,该方案允许视场超过压电扫描系统的范围,并放宽对照明稳定性的要求。

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