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使用深度感应纳米压痕技术研究金纳米颗粒和薄膜的纳米力学性能和变形行为的尺度效应。

Scale effects of nanomechanical properties and deformation behavior of Au nanoparticle and thin film using depth sensing nanoindentation.

机构信息

Nanoprobe Laboratory for Bio-& Nanotechnology and Biomimetics (NLBB), The Ohio State University, 201 W.19th Avenue, Columbus, Ohio 43210-1142, USA.

出版信息

Beilstein J Nanotechnol. 2014 Jun 11;5:822-36. doi: 10.3762/bjnano.5.94. eCollection 2014.

Abstract

Nanoscale research of bulk solid surfaces, thin films and micro- and nano-objects has shown that mechanical properties are enhanced at smaller scales. Experimental studies that directly compare local with global deformation are lacking. In this research, spherical Au nanoparticles, 500 nm in diameter and 100 nm thick Au films were selected. Nanoindentation (local deformation) and compression tests (global deformation) were performed with a nanoindenter using a sharp Berkovich tip and a flat punch, respectively. Data from nanoindentation studies were compared with bulk to study scale effects. Nanoscale hardness of the film was found to be higher than the nanoparticles with both being higher than bulk. Both nanoparticles and film showed increasing hardness for decreasing penetration depth. For the film, creep and strain rate effects were observed. In comparison of nanoindentation and compression tests, more pop-ins during loading were observed during the nanoindentation of nanoparticles. Repeated compression tests of nanoparticles were performed that showed a strain hardening effect and increased pop-ins during subsequent loads.

摘要

块状固体表面、薄膜、微纳物体的纳米级研究表明,机械性能在较小的尺度上得到增强。缺乏直接比较局部与整体变形的实验研究。在这项研究中,选择了直径为 500nm、厚度为 100nm 的球形 Au 纳米粒子和 100nm 厚的 Au 薄膜。使用纳米压痕仪,分别采用尖锐的 Berkovich 压头和平顶压头进行纳米压痕(局部变形)和压缩试验(整体变形)。将纳米压痕研究的数据与整体数据进行比较,以研究尺度效应。发现薄膜的纳米硬度高于纳米粒子,而两者均高于块状硬度。纳米粒子和薄膜的硬度均随压入深度的减小而增加。对于薄膜,观察到了蠕变和应变速率效应。在纳米压痕和压缩试验的比较中,在纳米压痕试验中,纳米粒子的加载过程中观察到更多的弹出。对纳米粒子进行了重复压缩试验,结果表明应变硬化效应和随后的载荷增加了弹出次数。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/e3e2/4077422/55f94668f4ac/Beilstein_J_Nanotechnol-05-822-g002.jpg

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