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[基于发射光谱法的大面积表面放电等离子体温度研究]

[Study on plasma temperature of a large area surface discharge by optical emission spectrum].

作者信息

Dong Li-Fang, Tong Guo-Liang, Zhang Yu, Zhou Bin

出版信息

Guang Pu Xue Yu Guang Pu Fen Xi. 2014 Apr;34(4):919-21.

PMID:25007600
Abstract

A large area surface discharge was realized in air/argon gas mixture by designing a discharge device with water electrodes. By using optical emission spectrum, the variations of the molecular vibrational temperature, the mean energy of electron, and the electronic excitation temperature as a function of the gas pressure were studied. The nitrogen molecular vibrational temperature was calculated according to the emission line of the second positive band system of the nitrogen molecule (C3 pi(u) --> B 3 pi(g)). The electronic excitation temperature was obtained by using the intensity ratio of Ar I 763.51 nm (2P(6) --> 1S(5)) to Ar I 772.42 nm (2P(2) --> 1S(3)). The changes in the mean energy of electron were studied by the relative intensity ratio of the nitrogen molecular ion 391.4 nm to nitrogen 337.1 nm. It was found that the intensity of emission spectral line increases with the increase in the gas pressure, meanwhile, the outline and the ratios of different spectral lines intensity also change. The molecular vibrational temperature, the mean energy of electron, and the electronic excitation temperature decrease as the gas pressure increases from 0.75 x 10(5) Pa to 1 x 10(5) Pa.

摘要

通过设计一种带有水电极的放电装置,在空气/氩气混合气体中实现了大面积的表面放电。利用发射光谱研究了分子振动温度、电子平均能量和电子激发温度随气压的变化。根据氮分子第二正带系(C3π(u)→B 3π(g))的发射线计算了氮分子振动温度。通过Ar I 763.51 nm(2P(6)→1S(5))与Ar I 772.42 nm(2P(2)→1S(3))的强度比获得电子激发温度。通过氮分子离子391.4 nm与氮337.1 nm的相对强度比研究了电子平均能量的变化。发现发射光谱线的强度随气压的增加而增加,同时,不同光谱线强度的轮廓和比值也发生变化。当气压从0.75×10(5) Pa增加到1×10(5) Pa时,分子振动温度、电子平均能量和电子激发温度降低。

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1
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