Benkouider A, Ronda A, Gouyé A, Herrier C, Favre L, Lockwood D J, Rowell N L, Delobbe A, Sudraud P, Berbezier I
CNRS, Aix-Marseille University, IM2NP, 13397 Marseille Cedex 20, France.
Nanotechnology. 2014 Aug 22;25(33):335303. doi: 10.1088/0957-4484/25/33/335303. Epub 2014 Jul 30.
Selective growth and self-organization of silicon-germanium (SiGe) nanowires (NWs) on focused ion beam (FIB) patterned Si(111) substrates is reported. In its first step, the process involves the selective synthesis of Au catalysts in SiO₂-free areas; its second step involves the preferential nucleation and growth of SiGe NWs on the catalysts. The selective synthesis process is based on a simple, room-temperature reduction of gold salts (Au³⁺Cl₄⁻) in aqueous solution, which provides well-organized Au catalysts. By optimizing the reduction process, we are able to generate a bidimensional regular array of Au catalysts with self-limited sizes positioned in SiO₂-free windows opened in a SiO₂/Si(111) substrate by FIB patterning. Such Au catalysts subsequently serve as preferential nucleation and growth sites of well-organized NWs. Furthermore, these NWs with tunable position and size exhibit the relevant features and bright luminescence that would find several applications in optoelectronic nanodevices.
报道了在聚焦离子束(FIB)图案化的Si(111)衬底上硅锗(SiGe)纳米线(NWs)的选择性生长和自组装。在第一步中,该过程涉及在无SiO₂区域选择性合成金催化剂;第二步涉及SiGe NWs在催化剂上的优先成核和生长。选择性合成过程基于在水溶液中对金盐(Au³⁺Cl₄⁻)进行简单的室温还原,这提供了有序的金催化剂。通过优化还原过程,我们能够在通过FIB图案化在SiO₂/Si(111)衬底中打开的无SiO₂窗口中生成具有自限尺寸的二维规则排列的金催化剂。这种金催化剂随后作为有序NWs的优先成核和生长位点。此外,这些位置和尺寸可调的NWs展现出相关特性和明亮的发光,这将在光电子纳米器件中有多种应用。