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在 Si(111)上生长的有序 SiGe 纳米线阵列的明亮光致发光。

Bright photoluminescence from ordered arrays of SiGe nanowires grown on Si(111).

机构信息

Measurement Science and Standards, National Research Council, 1200 Montreal Road, Ottawa, Ontario K1A 0R6, Canada.

CNRS, Institut Matériaux Microélectronique Nanosciences de Provence, AMU, Avenue Normandie Niemen, 13397 Marseille Cedex 20, France.

出版信息

Beilstein J Nanotechnol. 2014 Dec 30;5:2498-504. doi: 10.3762/bjnano.5.259. eCollection 2014.

Abstract

We report on the optical properties of SiGe nanowires (NWs) grown by molecular beam epitaxy (MBE) in ordered arrays on SiO2/Si(111) substrates. The production method employs Au catalysts with self-limited sizes deposited in SiO2-free sites opened-up in the substrate by focused ion beam patterning for the preferential nucleation and growth of these well-organized NWs. The NWs thus produced have a diameter of 200 nm, a length of 200 nm, and a Ge concentration x = 0.15. Their photoluminescence (PL) spectra were measured at low temperatures (from 6 to 25 K) with excitation at 405 and 458 nm. There are four major features in the energy range of interest (980-1120 meV) at energies of 1040.7, 1082.8, 1092.5, and 1098.5 meV, which are assigned to the NW-transverse optic (TO) Si-Si mode, NW-transverse acoustic (TA), Si-substrate-TO and NW-no-phonon (NP) lines, respectively. From these results the NW TA and TO phonon energies are found to be 15.7 and 57.8 meV, respectively, which agree very well with the values expected for bulk Si1- x Ge x with x = 0.15, while the measured NW NP energy of 1099 meV would indicate a bulk-like Ge concentration of x = 0.14. Both of these concentrations values, as determined from PL, are in agreement with the target value. The NWs are too large in diameter for a quantum confinement induced energy shift in the band gap. Nevertheless, NW PL is readily observed, indicating that efficient carrier recombination is occurring within the NWs.

摘要

我们报告了通过分子束外延(MBE)在 SiO2/Si(111)衬底上有序排列的 SiGe 纳米线(NWs)的光学性质。该生产方法采用自限制尺寸的 Au 催化剂,这些催化剂沉积在衬底中由聚焦离子束图案化打开的无 SiO2 区域中,以促进这些组织良好的 NWs 的优先成核和生长。所生产的 NWs的直径为 200nm,长度为 200nm,Ge 浓度 x = 0.15。它们的光致发光(PL)光谱在低温下(6 到 25K)进行测量,激发波长为 405nm 和 458nm。在感兴趣的能量范围内(980-1120meV)有四个主要特征,能量分别为 1040.7、1082.8、1092.5 和 1098.5meV,分别对应于 NW 横向光学(TO)Si-Si 模式、NW 横向声子(TA)、Si 衬底-TO 和 NW 无声子(NP)线。根据这些结果,NW TA 和 TO 声子能量分别为 15.7 和 57.8meV,与预期的 x = 0.15 的块状 Si1-xGe x 的值非常吻合,而测量的 NW NP 能量为 1099meV 则表明块状类似的 Ge 浓度为 x = 0.14。这两个浓度值都是从 PL 中确定的,与目标值一致。对于量子限制诱导能带隙的能量移动来说,NW 的直径太大了。尽管如此,仍可观察到 NW PL,这表明载流子复合正在 NW 内发生。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/baa2/4311733/73d3ae5538b9/Beilstein_J_Nanotechnol-05-2498-g002.jpg

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