Ni Yunfang, Li Hongsheng, Huang Libin
School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China.
Sensors (Basel). 2014 Oct 29;14(11):20419-38. doi: 10.3390/s141120419.
This paper focuses on the detailed design issues of a peculiar quadrature reduction method named system stiffness matrix diagonalization, whose key technology is the design and application of quadrature compensation patterns. For bulk silicon micro-gyroscopes, a complete design and application case was presented. The compensation principle was described first. In the mechanical design, four types of basic structure units were presented to obtain the basic compensation function. A novel layout design was proposed to eliminate the additional disturbing static forces and torques. Parameter optimization was carried out to maximize the available compensation capability in a limited layout area. Two types of voltage loading methods were presented. Their influences on the sense mode dynamics were analyzed. The proposed design was applied on a dual-mass silicon micro-gyroscope developed in our laboratory. The theoretical compensation capability of a quadrature equivalent angular rate no more than 412 °/s was designed. In experiments, an actual quadrature equivalent angular rate of 357 °/s was compensated successfully. The actual compensation voltages were a little larger than the theoretical ones. The correctness of the design and the theoretical analyses was verified. They can be commonly used in planar linear vibratory silicon micro-gyroscopes for quadrature compensation purpose.
本文重点关注一种名为系统刚度矩阵对角化的特殊正交误差减小方法的详细设计问题，其关键技术是正交补偿模式的设计与应用。针对体硅微陀螺仪，给出了一个完整的设计与应用案例。首先阐述了补偿原理。在机械设计方面，提出了四种基本结构单元以获得基本补偿功能。提出了一种新颖的布局设计以消除额外的干扰静力和扭矩。进行了参数优化，以在有限的布局区域内最大化可用补偿能力。介绍了两种电压加载方法。分析了它们对敏感模式动力学的影响。所提出的设计应用于我们实验室开发的双质量硅微陀螺仪。设计了正交等效角速率不超过412°/s的理论补偿能力。在实验中，成功补偿了357°/s的实际正交等效角速率。实际补偿电压比理论值略大。验证了设计和理论分析的正确性。它们可普遍用于平面线性振动硅微陀螺仪的正交补偿。
