Iterative scalar nonparaxial algorithm for the design of Fourier phase elements.

We propose an iterative algorithm based on our scalar nonparaxial propagator for the design of Fourier diffractive optical elements (DOEs) having features on the order of the illumination wavelength. The simulation results show that our algorithm, using iterative Fourier transform and iterative projection, obtains higher-performance DOEs than a purely scalar paraxial design with the same order of calculation time. Upon verification with the experimental results, we find that our scalar-based design method is valid for DOEs with surprisingly small feature sizes (about half the wavelength) and diffraction angles up to about 37°.