Liang Haibo, Soref Richard, Mu Jianwei, Li Xun, Huang Wei-Ping
Opt Express. 2014 Nov 17;22(23):28489-99. doi: 10.1364/OE.22.028489.
We have investigated a hybrid plasmonic-photonic mode in Si and Ge channel waveguides over the 1.55-8.0 μm wavelength range. A 10-nm Cu ribbon was buried midway within a Si₃N₄ "photonic slot" centered in the semiconductor strip. For the TMo mode, propagation lengths L of several millimeters are predicted for a waveguide cross-section of about 0.7λ/n x 0.7λ/n which offers optical confinement mainly within the ~λ²/400-area slot. The L increased strongly with λ. For 0.4λ/n x 0.4λ/n channels, we found multi-centimeter propagation, but there ~60% of the propagating energy had leaked out into the thick, all-around Si₃N₄ cladding.
我们研究了硅和锗沟道波导在1.55 - 8.0μm波长范围内的混合等离子体 - 光子模式。一条10nm的铜带埋在位于半导体条带中心的氮化硅“光子狭缝”中间位置。对于TMo模式,对于约0.7λ/n×0.7λ/n的波导横截面,预测传播长度L为几毫米,其主要在约λ²/400面积的狭缝内提供光限制。L随λ强烈增加。对于0.4λ/n×0.4λ/n的沟道,我们发现传播长度达数厘米,但约60%的传播能量泄漏到了较厚的周围氮化硅包层中。