Ling Tong, Yang Yongying, Yue Xiumei, Liu Dong, Ma Yifang, Bai Jian, Wang Kaiwei
Appl Opt. 2014 Oct 20;53(30):7144-52. doi: 10.1364/AO.53.007144.
A common-path and compact wavefront diagnosis system for both continuous and transient wavefronts measurement is proposed based on cross grating lateral shearing interferometer (CGLSI). Derived from the basic CGLSI configuration, this system employs an aplanatic lens to convert the wavefront under test into a convergent beam, which makes it possible for CGLSI to test the wavefront of collimated beams. A geometrical optics model for grating pitch determination and a Fresnel diffraction model for order selection mask design are presented. Then a detailed analysis about the influence of the grating pitch, the distance from the cross grating to the order selection mask and the numerical aperture of the aplanatic lens on the system error is made, and a calibration method is proposed to eliminate the system error. In addition, the differential Zernike polynomials fitting method is introduced for wavefront retrieval. Before our experiment, we have designed several grating pitches and their corresponding order selection mask parameters. In the final comparative experiment with ZYGO interferometer, the wavefront diagnosis system exhibits both high precision and repeatability.
基于交叉光栅横向剪切干涉仪（CGLSI），提出了一种用于连续和瞬态波前测量的共光路紧凑型波前诊断系统。该系统源于基本的CGLSI配置，采用消球差透镜将被测波前转换为会聚光束，这使得CGLSI能够测试准直光束的波前。提出了用于确定光栅间距的几何光学模型和用于设计选级掩模的菲涅耳衍射模型。然后详细分析了光栅间距、交叉光栅到选级掩模的距离以及消球差透镜的数值孔径对系统误差的影响，并提出了一种校准方法来消除系统误差。此外，引入了差分泽尼克多项式拟合方法进行波前重构。在实验之前，我们设计了几种光栅间距及其相应的选级掩模参数。在与ZYGO干涉仪的最终对比实验中，该波前诊断系统表现出了高精度和可重复性。
