Wright Stuart I, Nowell Matthew M, de Kloe René, Camus Patrick, Rampton Travis
EDAX, 392 East 12300 South, Suite H, Draper, UT 84020, USA.
EDAX, 392 East 12300 South, Suite H, Draper, UT 84020, USA.
Ultramicroscopy. 2015 Jan;148:132-145. doi: 10.1016/j.ultramic.2014.10.002. Epub 2014 Oct 23.
Electron Backscatter Diffraction (EBSD) has proven to be a useful tool for characterizing the crystallographic orientation aspects of microstructures at length scales ranging from tens of nanometers to millimeters in the scanning electron microscope (SEM). With the advent of high-speed digital cameras for EBSD use, it has become practical to use the EBSD detector as an imaging device similar to a backscatter (or forward-scatter) detector. Using the EBSD detector in this manner enables images exhibiting topographic, atomic density and orientation contrast to be obtained at rates similar to slow scanning in the conventional SEM manner. The high-speed acquisition is achieved through extreme binning of the camera-enough to result in a 5 × 5 pixel pattern. At such high binning, the captured patterns are not suitable for indexing. However, no indexing is required for using the detector as an imaging device. Rather, a 5 × 5 array of images is formed by essentially using each pixel in the 5 × 5 pixel pattern as an individual scattered electron detector. The images can also be formed at traditional EBSD scanning rates by recording the image data during a scan or can also be formed through post-processing of patterns recorded at each point in the scan. Such images lend themselves to correlative analysis of image data with the usual orientation data provided by and with chemical data obtained simultaneously via X-Ray Energy Dispersive Spectroscopy (XEDS).
电子背散射衍射（EBSD）已被证明是一种有用的工具，可用于在扫描电子显微镜（SEM）中表征从几十纳米到毫米长度尺度的微观结构的晶体取向特征。随着用于EBSD的高速数码相机的出现，将EBSD探测器用作类似于背散射（或前向散射）探测器的成像设备已变得切实可行。以这种方式使用EBSD探测器能够以与传统SEM慢扫描相似的速率获得呈现形貌、原子密度和取向对比度的图像。高速采集是通过相机的极端合并实现的——合并程度足以产生5×5像素图案。在如此高的合并程度下，捕获的图案不适合进行索引。然而，将探测器用作成像设备时不需要索引。相反，通过将5×5像素图案中的每个像素基本上用作单独的散射电子探测器，形成一个5×5的图像阵列。这些图像也可以在传统的EBSD扫描速率下通过在扫描期间记录图像数据来形成，或者也可以通过对扫描中每个点记录的图案进行后处理来形成。这样的图像有助于将图像数据与由X射线能量色散谱（XEDS）同时提供的常规取向数据以及化学数据进行相关分析。
