Droogendijk H, Casas J, Steinmann T, Krijnen G J M
MESA+ Institute for Nanotechnology, University of Twente, Enschede, The Netherlands.
Bioinspir Biomim. 2014 Dec 19;10(1):016001. doi: 10.1088/1748-3190/10/1/016001.
Despite vigorous growth in biomimetic design, the performance of man-made devices relative to their natural templates is still seldom quantified, a procedure which would however significantly increase the rigour of the biomimetic approach. We applied the ubiquitous engineering concept of a figure of merit (FoM) to MEMS flow sensors inspired by cricket filiform hairs. A well known mechanical model of a hair is refined and tailored to this task. Five criteria of varying importance in the biological and engineering fields are computed: responsivity, power transfer, power efficiency, response time and detection threshold. We selected the metrics response time and detection threshold for building the FoM to capture the performance in a single number. Crickets outperform actual MEMS on all criteria for a large range of flow frequencies. Our approach enables us to propose several improvements for MEMS hair-sensor design.
尽管仿生设计蓬勃发展，但人造设备相对于其天然模板的性能仍很少被量化，然而这一过程将显著提高仿生方法的严谨性。我们将无处不在的品质因数（FoM）工程概念应用于受蟋蟀丝状刚毛启发的MEMS流量传感器。对一个著名的刚毛力学模型进行了改进并针对此任务进行了调整。计算了生物和工程领域中五个重要性各异的标准：响应度、功率传输、功率效率、响应时间和检测阈值。我们选择响应时间和检测阈值这两个指标来构建品质因数，以便用一个数字来体现性能。在大范围的流动频率下，蟋蟀在所有标准上都优于实际的MEMS。我们的方法使我们能够为MEMS刚毛传感器设计提出若干改进建议。
