受蟋蟀棒状毛启发的仿生加速度计。
A biomimetic accelerometer inspired by the cricket's clavate hair.
机构信息
MESA Institute for Nanotechnology, University of Twente, Enschede, The Netherlands
MESA Institute for Nanotechnology, University of Twente, Enschede, The Netherlands.
出版信息
J R Soc Interface. 2014 Aug 6;11(97):20140438. doi: 10.1098/rsif.2014.0438.
Crickets use so-called clavate hairs to sense (gravitational) acceleration to obtain information on their orientation. Inspired by this clavate hair system, a one-axis biomimetic accelerometer has been developed and fabricated using surface micromachining and SU-8 lithography. An analytical model is presented for the design of the accelerometer, and guidelines are derived to reduce responsivity due to flow-induced contributions to the accelerometer's output. Measurements show that this microelectromechanical systems (MEMS) hair-based accelerometer has a resonance frequency of 320 Hz, a detection threshold of 0.10 ms(-2) and a dynamic range of more than 35 dB. The accelerometer exhibits a clear directional response to external accelerations and a low responsivity to airflow. Further, the accelerometer's physical limits with respect to noise levels are addressed and the possibility for short-term adaptation of the sensor to the environment is discussed.
蟋蟀利用所谓的棒状毛来感知（重力）加速度，以获取有关其方向的信息。受此棒状毛系统的启发，使用表面微加工和 SU-8 光刻技术开发并制造了一种单轴仿生加速度计。本文提出了一种用于加速度计设计的分析模型，并推导出了减小由于流动对加速度计输出的贡献而导致的响应的准则。测量结果表明，这种基于微机电系统（MEMS）毛发的加速度计的共振频率为 320 Hz，检测阈值为 0.10 ms（-2），动态范围超过 35 dB。该加速度计对外界加速度具有明显的定向响应，对气流的响应率较低。此外，还讨论了加速度计在噪声水平方面的物理极限以及传感器对环境进行短期适应的可能性。
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