Samad Mst Fateha, Kouzani Abbas Z
Annu Int Conf IEEE Eng Med Biol Soc. 2014;2014:4423-6. doi: 10.1109/EMBC.2014.6944605.
This paper presents a low actuation voltage microvalve with optimized insulating layers that manipulates a conducting ferro-fluid droplet by the principle of electrowetting-on-dielectric (EWOD). The proposed EWOD microvalve contains an array of chromium (Cr) electrodes on the soda-lime glass substrate, covered by both dielectric and hydrophobic layers. Various dielectric layers including Su-8 2002, Polyvinylidenefluoride (PVDF) and Cyanoethyl pullulan (CEP), and thin (50 nm) hydrophobic Teflon and Cytonix are used to analyze the EWOD microvalves at different voltages. The Finite Element Method (FEM) based software, Coventorware is used to carry out the simulation analysis. It is observed that the EWOD microvalve having a CEP dielectric layer with dielectric constant of about 20 and thickness of 1 μm, and a Cytonix hydrophobic layer with thickness of 50 nm operated the conducting ferro-fluid droplet at the actuation voltage as low as 7.8 V.
本文介绍了一种具有优化绝缘层的低驱动电压微阀，该微阀通过介电电泳（EWOD）原理操纵导电铁磁流体滴。所提出的EWOD微阀在钠钙玻璃基板上包含铬（Cr）电极阵列，并覆盖有介电层和疏水层。使用包括Su-8 2002聚偏二氟乙烯（PVDF）和氰基乙基支链淀粉（CEP）在内的各种介电层，以及薄（50 nm）的疏水聚四氟乙烯和Cytonix，来分析不同电压下的EWOD微阀。基于有限元方法（FEM）的软件Coventorware用于进行模拟分析。据观察，具有介电常数约为20且厚度为1μm的CEP介电层以及厚度为50 nm的Cytonix疏水层的EWOD微阀，在低至7.8 V的驱动电压下即可操纵导电铁磁流体滴。
