Fang Qing, Tu Xiaoguang, Song Junfeng, Jia Lianxi, Luo Xianshu, Yang Yan, Yu Mingbin, Lo Guoqiang
Opt Express. 2014 Dec 1;22(24):29914-20. doi: 10.1364/OE.22.029914.
We demonstrate the first PN-type carrier-induced silicon waveguide Bragg grating filter on a SOI wafer. The optical extinction ratio of this kind of filter can be efficiently modulated under both reverse and forward biases. The carrier-induced Bragg grating based on a PN junction is fabricated on the silicon waveguide using litho compensation technology. The measured optical bandwidth and the extinction ratio of the filter are 0.45 nm and 19 dB, respectively. The optical extinction ratio modulation under the reverse bias is more than 11.5 dB and it is more than 10 dB under the forward bias. Only 1-dB optical transmission loss is realized in this Bragg grating under a reverse bias. The shifting rates of the central wavelength under forward and reverse biases are ~-1.25 nm/V and 0.01 nm/V, respectively. The 3-dB modulation bandwidth of this filter is 5.1 GHz at a bias of -10 V.
我们在绝缘体上硅(SOI)晶圆上展示了首个PN型载流子诱导的硅波导布拉格光栅滤波器。这种滤波器的光学消光比在反向和正向偏置下均可有效调制。基于PN结的载流子诱导布拉格光栅利用光刻补偿技术在硅波导上制成。测得的滤波器光学带宽和消光比分别为0.45纳米和19分贝。反向偏置下的光学消光比调制超过11.5分贝,正向偏置下超过10分贝。在反向偏置下,该布拉格光栅仅实现了1分贝的光传输损耗。正向和反向偏置下中心波长的漂移率分别约为-1.25纳米/伏和0.01纳米/伏。在-10伏的偏置下,该滤波器的3分贝调制带宽为5.1吉赫兹。