通过数字微镜微调控制1.5微米晶圆熔合垂直腔面发射激光器的腔寿命

Control of cavity lifetime of 1.5 µm wafer-fused VCSELs by digital mirror trimming.

作者信息

Ellafi Dalila, Iakovlev Valdimir, Sirbu Alexei, Suruceanu Grigore, Mickovic Zlatco, Caliman Andrei, Mereuta Alexandru, Kapon Elyahou

出版信息

Opt Express. 2014 Dec 29;22(26):32180-7. doi: 10.1364/OE.22.032180.

DOI:10.1364/OE.22.032180

PMID:25607182

Abstract

Digital chemical etching is used to trim the output mirror thickness of wafer-fused VCSELs emitting at a wavelength near 1.5µm. The fine control of the photon cavity lifetime thus achieved is employed to extract important device parameters and optimize the combination of the threshold current, output power, and direct current modulation characteristics. The fabrication process is compatible with industrial production and should help in improving device yield and in reducing manufacturing costs.

摘要

数字化学蚀刻用于修整波长接近1.5μm的晶圆熔合垂直腔面发射激光器（VCSEL）的输出镜厚度。由此实现的光子腔寿命的精细控制被用于提取重要的器件参数，并优化阈值电流、输出功率和直流调制特性的组合。该制造工艺与工业生产兼容，应有助于提高器件成品率并降低制造成本。