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用于传感的具有可调圆柱面等离子体激元的自组装大面积环形腔阵列。

Self-assembled large-area annular cavity arrays with tunable cylindrical surface plasmons for sensing.

机构信息

Jiangsu Key Laboratory on Optoelectronic Technology, School of Physical Science and Technology, Nanjing Normal University , Nanjing 210023, China.

出版信息

ACS Nano. 2015 Feb 24;9(2):1913-25. doi: 10.1021/nn506834r. Epub 2015 Feb 5.

Abstract

Surface plasmons that propagate along cylindrical metal/dielectric interfaces in annular apertures in metal films, called cylindrical surface plasmons (CSPs), exhibit attractive optical characteristics. However, it is challenging to fabricate these nanocoaxial structures. Here, we demonstrate a practical low-cost route to manufacture highly ordered, large-area annular cavity arrays (ACAs) that can support CSPs with great tunability. By employing a sol-gel coassembly method, reactive ion etching and metal sputtering techniques, regular, highly ordered ACAs in square-centimeter-scale with a gap width tunable in the range of several to hundreds of nanometers have been produced with good reproducibility. Ag ACAs with a gap width of 12 nm and a gap height of 635 nm are demonstrated. By finite-difference time-domain simulation, we confirm that the pronounced dips in the reflectance spectra of ACAs are attributable to CSP resonances excited in the annular gaps. By adjusting etching time and Ag film thickness, the CSP dips can be tuned to sweep the entire optical range of 360 to 1800 nm without changing sphere size, which makes them a promising candidate for forming integrated plasmonic sensing arrays. The high tunability of the CSP resonant frequencies together with strong electric field enhancement in the cavities make the ACAs promising candidates for surface plasmon sensors and SERS substrates, as, for example, they have been used in liquid refractive index (RI) sensing, demonstrating a sensitivity of 1505 nm/RIU and a figure of merit of 9. One of the CSP dips of ACAs with a certain geometry size is angle- (0-70 degrees) and polarization-independent and can be used as a narrow-band absorber. Furthermore, the nano annular cavity arrays can be used to construct solar cells, nanolasers and nanoparticle plasmonic tweezers.

摘要

沿金属膜中环形孔的圆柱形金属/电介质界面传播的表面等离激元,称为圆柱形表面等离激元(CSP),具有吸引人的光学特性。然而,制造这些纳米同轴结构具有挑战性。在这里,我们展示了一种实用的低成本方法来制造高度有序的大面积环形腔阵列(ACA),这些阵列可以支持具有很大可调性的 CSP。通过采用溶胶-凝胶共组装方法、反应离子刻蚀和金属溅射技术,可以在几到几百纳米的范围内可调的间隙宽度制造出具有良好再现性的规则、高度有序的平方厘米级 ACA。已经制造出具有 12nm 间隙宽度和 635nm 间隙高度的 Ag ACA。通过有限差分时域模拟,我们确认 ACA 反射谱中的明显下降归因于在环形间隙中激发的 CSP 共振。通过调整蚀刻时间和 Ag 膜厚度,可以将 CSP 下降调谐到整个光学范围 360 至 1800nm,而无需改变球体尺寸,这使得它们成为形成集成等离子体传感阵列的有前途的候选者。CSP 共振频率的高可调性以及腔中的强电场增强使 ACA 成为表面等离子体传感器和 SERS 衬底的有前途的候选者,例如,它们已用于液体折射率(RI)传感,表现出 1505nm/RIU 的灵敏度和 9 的品质因数。ACA 的某个几何尺寸的 CSP 下降之一是角度(0-70 度)和偏振无关的,可以用作窄带吸收体。此外,纳米环形腔阵列可用于构建太阳能电池、纳米激光器和纳米颗粒等离子体镊子。

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