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热退火对Ag/WO₃薄膜中钨酸银相演变的影响。

Effect of thermal annealing on the phase evolution of silver tungstate in Ag/WO₃ films.

作者信息

Bose R Jolly, Sreedharan R Sreeja, Krishnan R Resmi, Reddy V R, Gupta Mukul, Ganesan V, Sudheer S K, Pillai V P Mahadevan

机构信息

Department of Optoelectronics, University of Kerala, Kariyavattom, Thiruvananthapuram, Kerala 695581, India.

UGC - DAE Consortium for Scientific Research, Khandwa Road, Indore 452017, Madhyapradesh, India.

出版信息

Spectrochim Acta A Mol Biomol Spectrosc. 2015 Jun 15;145:239-244. doi: 10.1016/j.saa.2015.01.125. Epub 2015 Feb 17.

DOI:10.1016/j.saa.2015.01.125
PMID:25791880
Abstract

Silver/tungsten oxide multi-layer films are deposited over quartz substrates by RF magnetron sputtering technique and the films are annealed at temperatures 200, 400 and 600°C. The effect of thermal annealing on the phase evolution of silver tungstate phase in Ag/WO3 films is studied extensively using techniques like X-ray diffraction, micro-Raman analysis, atomic force microscopy and photoluminescence studies. The XRD pattern of the as-deposited film shows only the peaks of cubic phase of silver. The film annealed at 200°C shows the presence of XRD peaks corresponding to orthorhombic phase of Ag2WO4 and peaks corresponding to cubic phase of silver with reduced intensity. It is found that, as annealing temperature increases, the volume fraction of Ag decreases and that of Ag2WO4 phase increases and becomes highest at a temperature of 400°C. When the temperature increases beyond 400°C, the volume fraction of Ag2WO4 decreases, due to its decomposition into silver and oxygen deficient phase Ag2W4O13. The micro-Raman spectra of the annealed films show the characteristic bands of tungstate phase which is in agreement with XRD analysis. The surface morphology of the films studied by atomic force microscopy reveals that the particle size and r.m.s roughness are highest for the sample annealed at 400°C. In the photoluminescence study, the films with silver tungstate phase show an emission peak in blue region centered around the wavelength 441 nm (excitation wavelength 256 nm).

摘要

通过射频磁控溅射技术在石英衬底上沉积银/氧化钨多层薄膜,并在200、400和600°C的温度下对薄膜进行退火处理。利用X射线衍射、显微拉曼分析、原子力显微镜和光致发光研究等技术,广泛研究了热退火对Ag/WO3薄膜中钨酸银相相演变的影响。沉积态薄膜的XRD图谱仅显示银立方相的峰。在200°C退火的薄膜显示出对应于Ag2WO4正交相的XRD峰以及强度降低的对应于银立方相的峰。研究发现,随着退火温度的升高,Ag的体积分数降低,而Ag2WO4相的体积分数增加,并在400°C时达到最高。当温度超过400°C时,由于Ag2WO4分解为银和缺氧相Ag2W4O13,其体积分数降低。退火薄膜的显微拉曼光谱显示出钨酸盐相的特征带,这与XRD分析结果一致。通过原子力显微镜研究的薄膜表面形貌表明,在400°C退火的样品的粒径和均方根粗糙度最高。在光致发光研究中,含有钨酸银相的薄膜在蓝色区域显示出一个发射峰,中心波长约为441nm(激发波长256nm)。

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