Talataisong W, Wang D N, Chitaree R, Liao C R, Wang C
Opt Lett. 2015 Apr 1;40(7):1220-2. doi: 10.1364/OL.40.001220.
We demonstrate a fiber in-line Mach-Zehnder interferometer based on an inner air-cavity with open micro-channel for high-pressure sensing applications. The inner air-cavity is fabricated by combining femtosecond laser micromachining and the fusion splicing technique. The micro-channel is drilled on the top of the inner air-cavity to allow the high-pressure gas to flow in. The fiber in-line device is miniature, robust, and stable in operation and exhibits a high pressure sensitivity of ∼8,239 pm/MPa.
我们展示了一种基于带有开放微通道的内部空气腔的光纤在线马赫-曾德尔干涉仪，用于高压传感应用。内部空气腔是通过飞秒激光微加工和熔接技术相结合制造的。在内部空气腔顶部钻出微通道，以使高压气体能够流入。该光纤在线装置体积小、坚固且运行稳定，表现出约8239 pm/MPa的高压灵敏度。
