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通过尺寸依赖的临界起皱应变控制和预防表面起皱

Controlling and prevention of surface wrinkling via size-dependent critical wrinkling strain.

作者信息

Han Xue, Zhao Yan, Cao Yanping, Lu Conghua

机构信息

School of Materials Science and Engineering, Tianjin University, Tianjin 300072, P. R. China.

出版信息

Soft Matter. 2015 Jun 14;11(22):4444-52. doi: 10.1039/c5sm00761e.

Abstract

Surface wrinkling may occur in a film-substrate system when the applied strain exceeds the critical value. However, the practically required strain for the onset of surface wrinkling can be different from the theoretically predicted value. Here we investigate the film size effect-dependent critical strain for the mechanical strain-induced surface wrinkling via a combination of experiments and theoretical analysis. In the poly(dimethylsiloxane)-based system fabricated by the smart combination of mechanical straining and selective O2 plasma (OP) exposure through Cu grids, the film size effect on the critical wrinkling strain is systematically studied by considering OP exposure duration, the mesh number and geometry of Cu grids. Meanwhile, a simple analytical solution revealing the film size effect is well established, which shows good consistency with the experimental results. This study provides an experimental and theoretical basis for finely tuning the critical wrinkling strain in a simple and quantitative manner, which can find a wide range of applications in such fields as microelectronic circuits and optical devices, where controlling and/or prevention of surface wrinkling are of great importance.

摘要

当施加的应变超过临界值时,薄膜 - 基底系统中可能会出现表面起皱现象。然而,表面起皱开始时实际所需的应变可能与理论预测值不同。在此,我们通过实验与理论分析相结合的方式,研究了机械应变诱导表面起皱时依赖于薄膜尺寸效应的临界应变。在通过机械拉伸与通过铜网格进行选择性氧气等离子体(OP)曝光的巧妙组合制备的聚二甲基硅氧烷基系统中,通过考虑OP曝光持续时间、铜网格的网孔数和几何形状,系统地研究了薄膜尺寸对临界起皱应变的影响。同时,建立了一个揭示薄膜尺寸效应的简单解析解,其与实验结果显示出良好的一致性。本研究为以简单且定量的方式微调临界起皱应变提供了实验和理论基础,这在微电子电路和光学器件等领域具有广泛的应用,在这些领域中,控制和/或防止表面起皱至关重要。

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