Liu Xuling, Li Songjing, Bao Gang
Department of Fluid Control and Automation, Harbin Institute of Technology, Harbin, China.
Department of Fluid Control and Automation, Harbin Institute of Technology, Harbin, China
J Lab Autom. 2016 Jun;21(3):412-22. doi: 10.1177/2211068215584769. Epub 2015 May 5.
This article presents a multiphysical system modeling and simulation of a pneumatic microactuator, which significantly influences the performance of a particular pneumatic microfluidic device. First, the multiphysical system modeling is performed by developing a physical model for each of its three integrated components: microchannel with a microvalve, a gas chamber, and an elastomer membrane. This is done for each step of operation for the whole system. The whole system is then considered a throttle blind capacitor model, and it is used to predict the response time of the pneumatic microactuator by correlating its characteristics such as gas pressurizing, hydraulic resistance, and membrane deformation. For this microactuator, when the maximum membrane deformation is 100 µm, the required actuated air pressure is 80 kPa, and the response time is 1.67 ms when the valve-opening degree is 0.8. The response time is 1.61 ms under fully open conditions. These simulated results are validated by the experimental results of the current and previous work. A correlation between the simulated and experimental results confirms that the multiphysical modeling presented in this work is applicable in developing a proper design of a pneumatic microactuator. Finally, the influencing factors of the response time are discussed and analyzed.
本文介绍了一种气动微执行器的多物理系统建模与仿真，该微执行器对特定的气动微流体装置的性能有显著影响。首先，通过为其三个集成组件（带微型阀的微通道、气室和弹性体膜）中的每一个开发物理模型来进行多物理系统建模。这是针对整个系统的每个操作步骤完成的。然后将整个系统视为节流盲电容模型，并通过关联其气体增压、液压阻力和膜变形等特性来预测气动微执行器的响应时间。对于此微执行器，当最大膜变形为100 µm时，所需的驱动气压为80 kPa，当阀门开度为0.8时响应时间为1.67 ms。在完全打开条件下响应时间为1.61 ms。这些模拟结果通过当前工作和先前工作的实验结果得到验证。模拟结果与实验结果之间的相关性证实了本文提出的多物理建模适用于开发合适的气动微执行器设计。最后，对响应时间的影响因素进行了讨论和分析。
