MacArthur K E, D'Alfonso A J, Ozkaya D, Allen L J, Nellist P D
Department of Materials, University of Oxford, Parks Road OX1 3PH, UK.
School of Physics, University of Melbourne, Parkville, Victoria 2010, Australia.
Ultramicroscopy. 2015 Sep;156:1-8. doi: 10.1016/j.ultramic.2015.04.010. Epub 2015 Apr 28.
An approach towards experiment design and optimisation is proposed for achieving improved accuracy of ADF STEM quantification. In particular, improved robustness to small sample mis-tilts can be achieved by optimising detector collection and probe convergence angles. A decrease in cross section is seen for tilted samples due to the reduction in channelling, resulting in a quantification error, if this is not taken into account. At a smaller detector collection angle the increased contribution from elastic scattering, which initially increases with tilt, can be used to offset the decrease in the TDS signal.
提出了一种用于实验设计和优化的方法，以提高环形暗场扫描透射电子显微镜（ADF STEM）定量分析的准确性。特别是，通过优化探测器收集角和探针会聚角，可以提高对小样品误倾斜的鲁棒性。由于沟道效应的减少，倾斜样品的截面会减小，如果不考虑这一点，会导致定量误差。在较小的探测器收集角下，弹性散射的贡献增加，其最初随倾斜度增加，可用于抵消热漫散射（TDS）信号的减少。
