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非零位干涉测量中非球面顶点曲率半径的测定

Determination of aspheric vertex radius of curvature in non-null interferometry.

作者信息

Yang Yongying, Zhang Lei, Shi Tu, Liu Dong, Chong Shiyao, Shen Yibing, Bai Jian

出版信息

Appl Opt. 2015 Apr 1;54(10):2838-44. doi: 10.1364/AO.54.002838.

Abstract

Traditional spherical radius of curvature interferometry is not valid for an aspheric vertex radius of curvature (VROC) due to the obstacle in identifying null positions (cat's eye or confocal position). Simultaneous optimization for multiconfiguration of an interferometer model is proposed to retrieve the actual aspheric VROC from its biased nominal value. This procedure works out the contradiction between VROC deviation and positioning error and even surface figure error, independent of absolute positioning by cat's eye or confocal position. In this method, the aspheric VROC and surface figure can be measured simultaneously, which facilitates the test process remarkably in practical optical shop testing. Furthermore, the parent VROC of a hollow aspheric (annular surface) also can be determined in this method. The performance of the proposed method is validated by experiments.

摘要

传统的球面曲率半径干涉测量法对于非球面顶点曲率半径(VROC)并不适用,因为在确定零位(猫眼或共焦位置)时存在障碍。本文提出了一种对干涉仪模型的多配置进行同步优化的方法,以从有偏差的标称值中获取实际的非球面VROC。该方法解决了VROC偏差与定位误差甚至表面形状误差之间的矛盾,且不依赖于通过猫眼或共焦位置进行的绝对定位。在这种方法中,可以同时测量非球面VROC和表面形状,这在实际光学车间测试中显著简化了测试过程。此外,该方法还可以确定中空非球面(环形表面)的母VROC。实验验证了所提方法的性能。

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