Detection method of inclination angle in image measurement based on improved triangulation.

Image distortion seriously affects the accuracy in microscope image measurement. One source of such distortion is related to the tilting of the microscope stage during laser scanning, thereby resulting in various degrees of inclination angles. This paper describes a novel technique that improves the traditional laser triangulation method by using multiple parallel laser beams that can solve the inclination problem. Moreover, a multi-light-spot measurement device, based on the improved laser triangulation technique, is proposed that can accurately detect the degree and directions of the inclination angles in real time. Furthermore, experimental results generated from a prototype of this device show that the new measurement system can effectively detect small inclination angles at a precision up to ±0.5  μrad.