通过原子层沉积使用无机/有机混合层对有机发光二极管进行薄膜封装。

Thin film encapsulation for organic light-emitting diodes using inorganic/organic hybrid layers by atomic layer deposition.

作者信息

Zhang Hao, Ding He, Wei Mengjie, Li Chunya, Wei Bin, Zhang Jianhua

机构信息

Key Laboratory of Advanced Display and System Applications, Ministry of Education, Shanghai University, Yanchang Road 149, Shanghai, 200072 China ; School of Mechatronic Engineering and Automation, Shanghai University, Yanchang Road 149, Shanghai, 200072 China.

Key Laboratory of Advanced Display and System Applications, Ministry of Education, Shanghai University, Yanchang Road 149, Shanghai, 200072 China.

出版信息

Nanoscale Res Lett. 2015 Apr 8;10:169. doi: 10.1186/s11671-015-0857-8. eCollection 2015.

DOI:10.1186/s11671-015-0857-8

PMID:25977648

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC4402680/

Abstract

A hybrid nanolaminates consisting of Al2O3/ZrO2/alucone (aluminum alkoxides with carbon-containing backbones) grown by atomic layer deposition (ALD) were reported for an encapsulation of organic light-emitting diodes (OLEDs). The electrical Ca test in this study was designed to measure the water vapor transmission rate (WVTR) of nanolaminates. We found that moisture barrier performance was improved with the increasing of the number of dyads (Al2O3/ZrO2/alucone) and the WVTR reached 8.5 × 10(-5) g/m(2)/day at 25°C, relative humidity (RH) 85%. The half lifetime of a green OLED with the initial luminance of 1,500 cd/m(2) reached 350 h using three pairs of the Al2O3 (15 nm)/ZrO2 (15 nm)/alucone (80 nm) as encapsulation layers.

摘要

据报道，通过原子层沉积（ALD）生长的由Al2O3/ZrO2/铝酮（含碳骨架的铝醇盐）组成的混合纳米层压板可用于封装有机发光二极管（OLED）。本研究中的电学钙测试旨在测量纳米层压板的水蒸气透过率（WVTR）。我们发现，随着二元组（Al2O3/ZrO2/铝酮）数量的增加，防潮性能得到改善，在25°C、相对湿度（RH）85%的条件下，WVTR达到8.5×10(-5) g/m(2)/天。使用三对Al2O3（15 nm）/ZrO2（15 nm）/铝酮（80 nm）作为封装层，初始亮度为1500 cd/m(2)的绿色OLED的半衰期达到350小时。