Camacho-Bunquin Jeffrey, Shou Heng, Aich Payoli, Beaulieu David R, Klotzsch Helmut, Bachman Stephen, Marshall Christopher L, Hock Adam, Stair Peter
Chemical Sciences and Engineering Division, Argonne National Laboratory, Lemont, Illinois 60439, USA.
Arradiance Inc., Sudbury, Massachusetts 01776, USA.
Rev Sci Instrum. 2015 Aug;86(8):084103. doi: 10.1063/1.4928614.
An integrated atomic layer deposition synthesis-catalysis (I-ALD-CAT) tool was developed. It combines an ALD manifold in-line with a plug-flow reactor system for the synthesis of supported catalytic materials by ALD and immediate evaluation of catalyst reactivity using gas-phase probe reactions. The I-ALD-CAT delivery system consists of 12 different metal ALD precursor channels, 4 oxidizing or reducing agents, and 4 catalytic reaction feeds to either of the two plug-flow reactors. The system can employ reactor pressures and temperatures in the range of 10(-3) to 1 bar and 300-1000 K, respectively. The instrument is also equipped with a gas chromatograph and a mass spectrometer unit for the detection and quantification of volatile species from ALD and catalytic reactions. In this report, we demonstrate the use of the I-ALD-CAT tool for the synthesis of platinum active sites and Al2O3 overcoats, and evaluation of catalyst propylene hydrogenation activity.
开发了一种集成原子层沉积合成-催化（I-ALD-CAT）工具。它将一个原子层沉积歧管与一个活塞流反应器系统串联，用于通过原子层沉积合成负载型催化材料，并使用气相探针反应立即评估催化剂的反应活性。I-ALD-CAT输送系统由12个不同的金属原子层沉积前驱体通道、4种氧化或还原剂以及4种催化反应进料组成，可输送至两个活塞流反应器中的任意一个。该系统可分别采用10(-3)至1巴的反应器压力和300-1000K的温度。该仪器还配备了气相色谱仪和质谱仪单元，用于检测和定量原子层沉积和催化反应中的挥发性物质。在本报告中，我们展示了I-ALD-CAT工具用于合成铂活性位点和Al2O3外涂层以及评估催化剂丙烯加氢活性的应用。
