Department of Engineering and System Science, National Tsing Hua University , Hsinchu, Taiwan 300, R.O.C.
Department of Physics, Tamkang University , Tamsui, Taiwan 251, R.O.C.
ACS Appl Mater Interfaces. 2015 Oct 7;7(39):21844-51. doi: 10.1021/acsami.5b06074. Epub 2015 Sep 24.
Plasma post-treatment process was observed to markedly enhance the electron field emission (EFE) properties of ultrananocrystalline diamond (UNCD) films. TEM examinations reveal that the prime factor which improves the EFE properties of these films is the coalescence of ultrasmall diamond grains (∼5 nm) forming large diamond grains about hundreds of nanometers accompanied by the formation of nanographitic clusters along the grain boundaries due to the plasma post-treatment process. OES studies reveal the presence of large proportion of atomic hydrogen and C2 (or CH) species, which are the main ingredients that altered the granular structure of the UNCD films. In the post-treatment process, the plasma interacts with the diamond films by a diffusion process. The recrystallization of diamond grains started at the surface region of the material, and the interaction zone increased with the post-treatment period. The entire diamond film can be converted into a nanocrystalline granular structure when post-treated for a sufficient length of time.
等离子体后处理过程被观察到显著提高了非晶金刚石（UNCD）薄膜的电子场发射（EFE）性能。TEM 检查表明，改善这些薄膜 EFE 性能的主要因素是由于等离子体后处理过程中小金刚石晶粒（约 5nm）的合并形成约数百纳米的大金刚石晶粒，同时在晶粒边界处形成纳米石墨簇。OES 研究表明存在大量的原子氢和 C2（或 CH）物质，这是改变 UNCD 薄膜颗粒结构的主要成分。在后处理过程中，等离子体通过扩散过程与金刚石薄膜相互作用。金刚石晶粒的再结晶从材料的表面区域开始，并且随着后处理时间的增加，相互作用区增加。当经过足够长的时间后处理时，整个金刚石薄膜可以转化为纳米晶颗粒结构。
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