Kim Sunbo, Lee Jaehyeong, Dao Vinh Ai, Ahn Shihyun, Hussain Shahzada Qamar, Park Jinjoo, Jung Junhee, Lee Chan, Song Bong-Shik, Choi Byoungdeog, Lee Youn-Jung, Iftiquar S M, Yi Junsin
J Nanosci Nanotechnol. 2015 Mar;15(3):2247-52. doi: 10.1166/jnn.2015.10247.
Transparent conductive oxides (TCOs) have been widely used as transparent electrodes for opto-electronic devices, such as solar cells, flat-panel displays, and light-emitting diodes, because of their unique characteristics of high optical transmittance and low electrical resistivity. Among various TCO materials, zinc oxide based films have recently received much attention because they have advantages over commonly used indium and tin-based oxide films. Most TCO films, however, exhibit valleys of transmittance in the wavelength range of 550-700 nm, lowering the average transmittance in the visible region and decreasing short-circuit current (Isc) of solar cells. A TCO/Ag/TCO multi-layer structure has emerged as an attractive alternative because it provides optical characteristics without the valley of transmittance compared with a 100-nm-thick single-layer TCO. In this article, we report the electrical, optical and surface properties of TCO/Ag/TCO. These multi-layers were deposited at room temperature with various Ag film thicknesses from 5 to 15 nm while the thickness of TCO thin film was fixed at 40 nm. The TCO/Ag/TCO multi-layer with a 10-nm-thick Ag film showed optimum transmittance in the visible (400-800 nm) wavelength region. These multi-layer structures have advantages over TCO layers of the same thickness.
透明导电氧化物（TCOs）因其具有高光学透过率和低电阻率的独特特性，已被广泛用作光电器件的透明电极，如太阳能电池、平板显示器和发光二极管。在各种TCO材料中，氧化锌基薄膜最近备受关注，因为它们比常用的铟锡氧化物薄膜具有优势。然而，大多数TCO薄膜在550 - 700 nm波长范围内表现出透过率低谷，降低了可见光区域的平均透过率，并降低了太阳能电池的短路电流（Isc）。与100 nm厚的单层TCO相比，TCO/Ag/TCO多层结构作为一种有吸引力的替代方案出现，因为它提供了没有透过率低谷的光学特性。在本文中，我们报告了TCO/Ag/TCO的电学、光学和表面性质。这些多层膜在室温下沉积，Ag膜厚度从5到15 nm不等，而TCO薄膜的厚度固定为40 nm。具有10 nm厚Ag膜的TCO/Ag/TCO多层膜在可见光（400 - 800 nm）波长区域表现出最佳透过率。这些多层结构比相同厚度的TCO层具有优势。
