Renaud D, Gerst D, Mazouffre S, Aanesland A
ICARE, CNRS, 1C Av. de la Recherche Scientifique, 45071 Orléans, France.
LPP, Ecole Polytechnique, Route de Saclay, F-91128 Palaiseau, France.
Rev Sci Instrum. 2015 Dec;86(12):123507. doi: 10.1063/1.4937604.
This paper reports on the design, the building, the calibration, and the use of a compact E × B probe that acts as a velocity filter or a mass filter for ion species. A series of measurements has been performed in the discharge and in the beam of the PEGASES (Plasma Propulsion with Electronegative GASES) ion source. PEGASES is a unique inductively coupled radio-frequency source able to generate a beam of positive and negative ions when operated with an electronegative gas. In this study, experiments have been carried out with SF6. Calibrated E × B probe spectra indicate that the diagnostic tool can be used to determine the ion velocity and the plasma composition even when many molecular fragments are present. In addition, the probe is able to detect both positive and negative ions. Measurements show a large variety of positively charged ions coming from SF6. Conversely, the beam is solely composed of F(-) and SF6(-) negative ions in compliance with computer simulations.
本文报道了一种紧凑型E×B探针的设计、构建、校准及应用，该探针可作为离子种类的速度过滤器或质量过滤器。在PEGASES（含电负性气体的等离子体推进）离子源的放电和束流中进行了一系列测量。PEGASES是一种独特的电感耦合射频源，在与电负性气体一起运行时能够产生正离子束和负离子束。在本研究中，使用SF6进行了实验。经校准的E×B探针光谱表明，即使存在许多分子碎片，该诊断工具也可用于确定离子速度和等离子体组成。此外，该探针能够检测正离子和负离子。测量结果显示，有大量来自SF6的带正电离子。相反，根据计算机模拟，束流仅由F(-)和SF6(-)负离子组成。
