主动应力研磨盘的实验动态变形分析

Experimental dynamic deformation analysis of active stressed lap.

作者信息

Zhao Hongshen, Li Xiaojin, Fan Bin, Zeng Zhige

出版信息

Appl Opt. 2016 Feb 20;55(6):1190-7. doi: 10.1364/AO.55.001190.

DOI:10.1364/AO.55.001190

Abstract

We introduce a method to measure the dynamic surface deformation of an active stressed lap for fabricating a 4 mf/1.5 mirror. Lap surface accuracy working in some typical deformation velocities is put forward. Experimental results indicate that dynamic lap surface accuracy is worse than that of a static surface, and dynamic surface accuracy gets worse if deformation velocity increases, while the difference of lap surface error RMS is less than 1 μm. An optimization of the processing strategy is feasible through changing the deformation velocity of the active stressed lap depending on the processing schedule. After optimizing the grinding and polishing strategy, efficiency is expected to have a significant increase.

摘要

我们介绍了一种用于制造4米焦距/1.5米镜子的主动应力研磨盘动态表面变形测量方法。提出了在一些典型变形速度下工作的研磨盘表面精度。实验结果表明，动态研磨盘表面精度比静态表面差，并且如果变形速度增加，动态表面精度会变差，而研磨盘表面误差均方根（RMS）的差异小于1微米。根据加工进度，通过改变主动应力研磨盘的变形速度来优化加工策略是可行的。优化研磨和抛光策略后，效率有望显著提高。