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用于离轴非球面碳化硅轻量化反射镜应力镜抛光的等效薄板法

Equivalent thin-plate method for stressed mirror polishing of an off-axis aspheric silicon carbide lightweight mirror.

作者信息

Yi Liqi, Zhang Xuejun, Hu Haifei, Zhang Zhiyu, Zeng Xuefeng, Luo Xiao, Xue Donglin, Zhang Ge

出版信息

Opt Express. 2020 Nov 23;28(24):36413-36431. doi: 10.1364/OE.410759.

DOI:10.1364/OE.410759
PMID:33379735
Abstract

No physical model of stressed mirror polishing, based on the small deflection and deformation of elastic thin plates, has been applied in processing lightweight mirrors. We propose an equivalent thin-plate method for the stressed loading of lightweight mirrors for the first time. Stressed loading and polishing of an aspheric lightweight mirror are simulated using the small-deflection deformation theory of an elastic thin plate. We simulate off-axis aspheric silicon carbide (SiC) lightweight mirrors with three different structures, determining the corresponding equivalent thickness plate in a lightweight structure with a nearly uniform surface density distribution and isotropic bending properties. We then establish a residual removal model of a stressed polishing surface, design the stressed loading equipment, and propose an iterative method for stressed polishing of an off-axis aspheric SiC lightweight mirror. The results demonstrate that it is feasible to choose a lightweight structure that performs full-aperture stressed polishing on off-axis aspheric lightweight mirrors consisting of SiC or other materials.

摘要

基于弹性薄板小挠度和变形的应力镜抛光物理模型尚未应用于轻质镜加工。我们首次提出了一种用于轻质镜应力加载的等效薄板方法。利用弹性薄板小挠度变形理论模拟了非球面轻质镜的应力加载和抛光过程。我们模拟了三种不同结构的离轴非球面碳化硅(SiC)轻质镜,在具有近乎均匀表面密度分布和各向同性弯曲特性的轻质结构中确定了相应的等效厚度板。然后建立了应力抛光表面的残余去除模型,设计了应力加载设备,并提出了离轴非球面SiC轻质镜应力抛光的迭代方法。结果表明,选择一种能对由SiC或其他材料制成的离轴非球面轻质镜进行全口径应力抛光的轻质结构是可行的。

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